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首页> 外文期刊>Japanese journal of applied physics >Estimation of sheath electric field in inductively coupled hydrogen plasma on the basis of Doppler-broadened absorption spectrum of hydrogen Balmer-α line
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Estimation of sheath electric field in inductively coupled hydrogen plasma on the basis of Doppler-broadened absorption spectrum of hydrogen Balmer-α line

机译：基于氢BALMER-α线的多普勒扩大吸收光谱估计电感耦合氢等离子体的鞘电场

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摘要

We examined the applicability of the Doppler-broadened absorption spectrum of the hydrogen Balmer-alpha line to the estimation of the sheath electric field in plasma. The Stark splitting of the fine-structure components was calculated by solving the time-independent Schrodinger equation at various electric field strengths, and the theoretical absorption spectrum was obtained by the superposition of the fine-structure components with the same Doppler broadening widths. The spectrum of the Balmer-alpha line of atomic hydrogen, which was measured by standard diode laser absorption spectroscopy, was fitted with the theoretical spectrum. We succeeded in determining the translational temperature of atomic hydrogen, which was obtained from the Doppler broadening width, and the electric field strength by the spectral fitting. We have evaluated that the minimum electric field strength that can be detected by the present method is approximately 350 V cm(-1) when the translational temperature of atomic hydrogen is 400-500 K.
机译：我们研究了多普勒 - 拓宽的吸收光谱对氢BALMER-α线的适用性，以估计等离子体中的鞘电场。通过求解各种电场强度的互相独立的Schrodinger方程来计算细结构组件的滞留分裂，并且通过具有相同多普勒展宽宽度的微结构部件的叠加来获得理论吸收光谱。通过标准二极管激光吸收光谱法测量的BALMER-α线的光谱配备了理论谱。我们成功地确定了原子氢的平移温度，通过光谱配合从多普勒展宽宽度和电场强度获得的原子氢的平移温度。我们已经评估了当原子氢的平移温度为400-500k时，通过本方法检测的最小电场强度约为350 V cm（-1）。

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