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首页> 外文期刊>Journal of Applied Physics >Structural analysis of polymer thin films using GISAXS in the tender X-ray region: Concept and design of GISAXS experiments using the tender X-ray energy at BL-15A2 at the Photon Factory
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Structural analysis of polymer thin films using GISAXS in the tender X-ray region: Concept and design of GISAXS experiments using the tender X-ray energy at BL-15A2 at the Photon Factory

机译：X射线区域中使用GISAXS的聚合物薄膜的结构分析：使用光子工厂BL-15A2的X射线能量的GISAXS实验的概念和设计

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摘要

If small angle X-ray scattering (SAXS) utilizing the soft X-ray region is available, advanced and unique experiments, which differ from traditional SAXS methods, can be realized. For example, grazing-incidence small angle X-ray scattering (GISAXS) using hard X-ray is a powerful tool for understanding the nanostructure in both vertical and lateral directions of thin films, while GISAXS utilizing the tender X-ray region (SX-GISAXS) enables depth-resolved analysis as well as a standard GISAXS analysis in thin films. Thus, at BL-15A2 at the Photon Factory, a dedicated diffractometer for SX-GISAXS (above 2.1 keV) was constructed. This diffractometer is composed of four vacuum chambers and can be converted into the vacuum state from the sample chamber in front of the detector surface. Diffractions are clearly observed until 12th peak when measuring collagen by SAXS with an X-ray energy of 2.40 keV and a camera length of 825 mm. Additionally, we conducted the model experiment using SX-GISAXS with an X-ray energy of 2.40 keV to confirm that a poly(methyl meth-acrylate)-poly(n-butyl acrylate) block copolymer thin film has a microphase-separated structure in the thin film, which is composed of lamellae aligned both parallel and perpendicular to the substrate surface. Similarly, in a polystyrene-poly(methyl methacrylate) block copolymer thin film, SX-GISAXS with 3.60keV and 5.73 keV revealed that hexagonally packed cylinders are aligned parallel to the substrate surface. The incident angle dependence of the first order peak position of the q_z direction obtained from experiments at various incident X-ray energies agrees very well with the theoretical one calculated from the distorted wave Born approximation.
机译：如果可获得利用软X射线区域的小角度X射线散射（SAXS），则可以实现与传统SAXS方法不同的高级且独特的实验。例如，使用硬X射线的掠入射小角度X射线散射（GISAXS）是了解薄膜垂直和横向纳米结构的有力工具，而GISAXS则利用嫩X射线区域（SX- GISAXS）支持深度解析分析以及薄膜中的标准GISAXS分析。因此，在光子工厂的BL-15A2处，构造了专用于SX-GISAXS（2.1 keV以上）的衍射仪。该衍射仪由四个真空室组成，可以从检测器表面前面的样品室转换为真空状态。用SAXS在2.40 keV的X射线能量和825 mm的照相机长度下通过SAXS测量胶原蛋白时，可以清楚地观察到衍射，直到第12个峰。此外，我们使用X射线能量为2.40 keV的SX-GISAXS进行了模型实验，以确认聚（甲基丙烯酸甲酯）-聚（丙烯酸正丁酯）嵌段共聚物薄膜具有微相分离结构。薄膜由平行于和垂直于基材表面排列的薄片组成。类似地，在聚苯乙烯-聚（甲基丙烯酸甲酯）嵌段共聚物薄膜中，具有3.60keV和5.73keV的SX-GISAXS显示六角形填充的圆柱体平行于基材表面排列。在各种入射X射线能量下从实验获得的q_z方向的一阶峰位置的入射角依赖性与从畸变波Born近似计算得出的理论值非常吻合。

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  • 来源
    《Journal of Applied Physics》 |2016年第14期|142119.1-142119.5|共5页
  • 作者

    H. Takagi; N. Igarashi; T. Mori; S. Saijo; Y. Nagatani; H. Ohta; K. Yamamoto; N. Shimizu;

  • 作者单位

    Photon Factory, Institute of Materials Structure Science, High Energy Accelerator Research Organization, 1-1 Oho, Tsukuba, Ibaraki 305-0801, Japan;

    Photon Factory, Institute of Materials Structure Science, High Energy Accelerator Research Organization, 1-1 Oho, Tsukuba, Ibaraki 305-0801, Japan;

    Photon Factory, Institute of Materials Structure Science, High Energy Accelerator Research Organization, 1-1 Oho, Tsukuba, Ibaraki 305-0801, Japan;

    Photon Factory, Institute of Materials Structure Science, High Energy Accelerator Research Organization, 1-1 Oho, Tsukuba, Ibaraki 305-0801, Japan;

    Photon Factory, Institute of Materials Structure Science, High Energy Accelerator Research Organization, 1-1 Oho, Tsukuba, Ibaraki 305-0801, Japan;

    Mitsubishi Electric System & Service Co., Ltd, Accelerator Engineering Center, 2-8- 8 Umezono, Tsukuba, Ibaraki 305-0045, Japan;

    Graduate School of Engineering, Department of Materials Science & Technology, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan;

    Photon Factory, Institute of Materials Structure Science, High Energy Accelerator Research Organization, 1-1 Oho, Tsukuba, Ibaraki 305-0801, Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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