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首页> 外文期刊>Journal of Applied Physics >A high-energy electron scattering study of the electronic structure and elemental composition of O-implanted Ta films used for the fabrication of memristor devices
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A high-energy electron scattering study of the electronic structure and elemental composition of O-implanted Ta films used for the fabrication of memristor devices

机译:高能电子散射研究用于忆阻器器件制造的O注入Ta膜的电子结构和元素组成

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摘要

High-energy electron scattering is used to investigate Ta films implanted with 10keV O ions. These films are of interest as they have been used for the fabrication of memristors. High-energy electron scattering is used with incoming electron energies ranging from 5 to 40 keV. The inelastic mean free path, and hence the probing depth, is at these energies of the same order as the range of the implanted ions. At the same time, we can distinguish the mass of the atom that scattered the electron elastically, due to the dependence of the recoil energy on the mass of the scatterer. This allows us to determine quantitatively the atomic composition near the surface from the signal of electrons that have scattered elastically but not inelastically. Electrons that have scattered inelastically as well as elastically provide us with information on the possible electronic excitations. Their signal is used to monitor the presence of the Ta_2O_5 phase near the surface (characterised by a significant band gap of (≌)4.5eV), and estimate at what depth below the surface pure Ta metal is present. In this way, we obtain a fairly detailed picture of the elemental composition and electronic properties of these films.
机译:高能电子散射用于研究注入10keV O离子的Ta膜。这些薄膜很有趣,因为它们已被用于制造忆阻器。高能电子散射用于入射电子能量为5至40 keV的情况。这些能量的无弹性平均自由程和探测深度与注入离子的范围处于同一数量级。同时,由于反冲能量对散射体质量的依赖性,我们可以区分使电子弹性散射的原子的质量。这使我们能够根据已经弹性而非非弹性散射的电子信号定量确定表面附近的原子组成。非弹性散射和弹性散射的电子为我们提供了有关可能的电子激发的信息。他们的信号用于监测表面附近Ta_2O_5相的存在(其特征是(≌)4.5eV的明显带隙),并估计在表面以下的深度存在纯Ta金属。通过这种方式,我们可以获得这些薄膜的元素组成和电子特性的相当详细的图片。

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  • 来源
    《Journal of Applied Physics》 |2013年第7期|073508.1-073508.7|共7页
  • 作者单位

    Atomic and Molecular Physics Laboratories, Research School of Physics and Engineering, The Australian National University, Canberra, ACT 0200, Australia;

    Department of Electronic Materials Engineering, Research School of Physics and Engineering, The Australian National University, Canberra, ACT 0200, Australia,Instituto de Fisica da Universidade Federal do Rio Grande do Sul, Avenida Bento Goncalves 9500, 91501-970, Porto Alegre, RS, Brazil;

    Department of Electronic Materials Engineering, Research School of Physics and Engineering, The Australian National University, Canberra, ACT 0200, Australia,Research School of Astronomy and Astrophysics, The Australian National University, Canberra, ACT 261I, Australia,Department of Physics, University of Chittagong, Chittagong, Chittagong - 4331, Bangladesh;

    Department of Electronic Materials Engineering, Research School of Physics and Engineering, The Australian National University, Canberra, ACT 0200, Australia;

    Department of Electronic Materials Engineering, Research School of Physics and Engineering, The Australian National University, Canberra, ACT 0200, Australia;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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