An analytical model of computing ion energy distributions for multiple frequencies capacitive discharges

Zhuwen Zhou; Rongfeng Linghu; Mingsen Deng; Deyong Xiong

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An analytical model of computing ion energy distributions for multiple frequencies capacitive discharges

机译：计算多频率电容性放电的离子能量分布的解析模型

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摘要

We have developed an analytical multi-frequency model, which results in accurate multi-peaks of the ion energy distributions (IEDs) for the given control parameters. The model can analytically calculate and predict the IEDs multiple peaks and energy width with necessary plasma parameters. This model can also predict the IEDs from multiple frequencies' drives at any voltage, the associated results are compared with particle-in-cell (PIC) simulations. The IED at a surface is an important parameter for processing in multiple radio frequencies driven capacitive discharges. The analytical model is developed for the IED in a low pressure discharge based on a linear transfer function that relates the time-varying sheath voltage to the time-varying ion energy response at the surface. This model is in good agreement with PIC simulations over a wide range of multiple frequencies driven capacitive discharge excitations.

机译：我们已经开发了一种分析型多频率模型，对于给定的控制参数，该模型可得出准确的离子能量分布（IED）的多峰。该模型可以通过必要的等离子体参数来分析计算和预测IED的多个峰和能量宽度。该模型还可以在任何电压下从多个频率的驱动器中预测IED，并将相关结果与单元中粒子（PIC）仿真进行比较。表面处的IED是在多个射频驱动的电容性放电中进行处理的重要参数。基于线性传递函数针对低压放电中的IED开发了分析模型，该函数将随时间变化的鞘管电压与表面处随时间变化的离子能量响应相关联。该模型与PIC仿真在多种频率驱动的电容性放电激励的广泛范围内非常吻合。

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《Journal of Applied Physics》 |2012年第6期|p.063306.1-063306.7|共7页
作者
Zhuwen Zhou; Rongfeng Linghu; Mingsen Deng; Deyong Xiong;
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作者单位

School of Physics and Electronic Science, Guizhou Normal College, Guiyang 550018, China;

School of Physics and Electronic Science, Guizhou Normal College, Guiyang 550018, China;

School of Physics and Electronic Science, Guizhou Normal College, Guiyang 550018, China;

School of Physics and Electronic Science, Guizhou Normal College, Guiyang 550018, China;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
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An analytical model of computing ion energy distributions for multiple frequencies capacitive discharges

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