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首页> 外文期刊>Journal of Applied Physics >Transformation reactions of copper centers in the space-charge region of a copper-diffused silicon crystal measured by deep-level transient spectroscopy
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Transformation reactions of copper centers in the space-charge region of a copper-diffused silicon crystal measured by deep-level transient spectroscopy

机译：用深层瞬态光谱法测量铜扩散硅晶体的空间电荷区域中铜中心的转变反应

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摘要

The transformation reactions of copper centers by annealing in Schottky electrode-formed (EL-formed) silicon crystals diffused with copper were measured by deep-level transient spectroscopy (DLTS) and the results were compared with those measured in samples without electrode (EL-free). The dissociation speeds of the dominant center (denoted as the Cu_(DLB) center) to the dissociation product (denoted as the Cu_(DLA) center) in the EL-formed samples were more than two orders faster than those in EL-free samples at respective annealing temperatures, although the dissociation energy of the former center was identical in both samples. An extended copper center, which was never observed in EL-free samples, was formed in the EL-formed samples at the cost of the Cu_(DLA) center. The origins of these specialties in the EL-formed samples were attributed to the actions of the electric field on the copper species in the space-charge region of the samples. The easy dissociation of the Cu_(DLA) center in the EL-formed samples was explained by the change in the charge state of the center in the space-charge region of the samples. From this analysis, the positively charged copper bonded at the bond center (Cu_(BC)~+) was proposed as the most probable model for the Cu_(DLA) center.
机译：通过深层瞬态光谱法（DLTS）测量了退火在铜扩散的肖特基电极形成的（EL形成）硅晶体中铜中心的转化反应，并将结果与​​没有电极的样品（无EL）进行了比较）。 EL形成样品中的主控中心（表示为Cu_（DLB）中心）到解离产物（表示为Cu_（DLA）中心）的解离速度比不含EL的样品快两倍以上。尽管在两个样品中，前一个中心的解离能是相同的，但在各自的退火温度下仍是如此。在形成EL的样品中形成了一个延伸的铜中心，这是在不含EL的样品中从未观察到的，但以Cu_（DLA）中心为代价。这些特殊性质在EL形成的样品中的起源归因于电场对样品空间电荷区域中铜种类的作用。通过形成在样品的空间电荷区域中的中心的电荷状态的变化来解释在EL形成的样品中Cu_（DLA）中心的容易解离。通过此分析，提出了在键中心（Cu_（BC）〜+）上键合的带正电的铜是Cu_（DLA）中心最可能的模型。

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  • 来源
    《Journal of Applied Physics》 |2012年第6期|p.063530.1-063530.5|共5页
  • 作者

    Minoru Nakamura; Susumu Murakami; Haruhiko Udono;

  • 作者单位

    College of Engineering, Ibaraki University, 12-1 Nakanarusawa-cho 4-chome, Hitachi, Ibaraki 316-8511, Japan,Hitachi Research Laboratory, Hitachi, Ltd., 1-1 Omika-cho 7-chome, Hitachi, Ibaraki 319-1292, Japan;

    Hitachi Research Laboratory, Hitachi, Ltd., 1-1 Omika-cho 7-chome, Hitachi, Ibaraki 319-1292, Japan;

    College of Engineering, Ibaraki University, 12-1 Nakanarusawa-cho 4-chome, Hitachi, Ibaraki 316-8511, Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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