Stability of Ag nanocrystals synthesized by ultra-low energy ion implantation in SiO_2 matrices

Patrizio Benzo; Laura Cattaneo; Cosmin Farcau; Andrea Andreozzi; Michele Perego; Gérard Benassayag; Béatrice Pécassou; Robert Carles; Caroline Bonafos

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Stability of Ag nanocrystals synthesized by ultra-low energy ion implantation in SiO_2 matrices

机译：SiO_2基体中超低能离子注入合成的Ag纳米晶体的稳定性

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Ultra low energy ion implantation is a promising technique for the wafer-scale fabrication of Silver nanoparticle planar arrays embedded in thermal silica on silicon substrate. The stability versus time of these nanoparticles is studied at ambient conditions on a time scale of months. The plasmonic signature of Ag NPs vanishes several months after implantation for as-implanted samples, while samples annealed at intermediate temperature under N_2 remain stable. XPS and HREM analysis evidence the presence of Silver oxide nanoparticles on aged samples and pure Silver nanoparticles on the annealed ones. This thermal treatment does not modify the size-distribution or position of the particles but is very efficient in stabilizing the metallic particles and to prevent any form of oxidation.

机译：超低能量离子注入是一种有前途的技术，可用于晶片级制造嵌入在硅基板上的热二氧化硅中的银纳米粒子平面阵列。这些纳米颗粒的稳定性与时间的关系在环境条件下以月为单位进行了研究。 Ag NPs的等离子特征在植入后几个月就消失了，而在N_2的中间温度下退火的样品保持稳定。 XPS和HREM分析证明老化样品上存在氧化银纳米颗粒，而退火样品上存在纯银纳米颗粒。该热处理不会改变颗粒的尺寸分布或位置，但是在稳定金属颗粒和防止任何形式的氧化方面非常有效。

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来源
《Journal of Applied Physics》 |2011年第10期|p.451-457|共7页
作者
Patrizio Benzo; Laura Cattaneo; Cosmin Farcau; Andrea Andreozzi; Michele Perego; Gérard Benassayag; Béatrice Pécassou; Robert Carles; Caroline Bonafos;
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作者单位

Groupe Nanomat, CEMES-CNRS et Université de Toulouse, 29 me Jeanne Marvig - BP 94347 - 31055 Toulouse Cedex 4, France;

Groupe Nanomat, CEMES-CNRS et Université de Toulouse, 29 me Jeanne Marvig - BP 94347 - 31055 Toulouse Cedex 4, France;

Groupe Nanomat, CEMES-CNRS et Université de Toulouse, 29 me Jeanne Marvig - BP 94347 - 31055 Toulouse Cedex 4, France;

Laboratorio MDM, IMM-CNR, via C Olivetti 2,I-20864 Agrate Brianza (MB), Italy;

Laboratorio MDM, IMM-CNR, via C Olivetti 2,I-20864 Agrate Brianza (MB), Italy;

Groupe Nanomat, CEMES-CNRS et Université de Toulouse, 29 me Jeanne Marvig - BP 94347 - 31055 Toulouse Cedex 4, France;

Groupe Nanomat, CEMES-CNRS et Université de Toulouse, 29 me Jeanne Marvig - BP 94347 - 31055 Toulouse Cedex 4, France;

Groupe Nanomat, CEMES-CNRS et Université de Toulouse, 29 me Jeanne Marvig - BP 94347 - 31055 Toulouse Cedex 4, France;

Groupe Nanomat, CEMES-CNRS et Université de Toulouse, 29 me Jeanne Marvig - BP 94347 - 31055 Toulouse Cedex 4, France;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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机译：纳米尺寸对Si离子注入合成SiO_2中Si纳米晶体光学性能的影响
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Stability of Ag nanocrystals synthesized by ultra-low energy ion implantation in SiO_2 matrices

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