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首页> 外文期刊>Journal of Applied Physics >Microstructure of compositionally-graded (Ba_(1-x)Sr_xTiO_3 thin films epitaxially grown on La_(0.5)Sr_(0.5)CoO_3-covered (100) LaAlO_3 substrates by pulsed laser deposition
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Microstructure of compositionally-graded (Ba_(1-x)Sr_xTiO_3 thin films epitaxially grown on La_(0.5)Sr_(0.5)CoO_3-covered (100) LaAlO_3 substrates by pulsed laser deposition

机译：通过脉冲激光沉积在La_（0.5）Sr_（0.5）CoO_3覆盖（100）LaAlO_3衬底上外延生长的成分渐变（Ba_（1-x）Sr_xTiO_3薄膜的微观结构

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摘要

Compositionally-graded (Ba_(1-x)Sr_x)TiO_3 (BST) epitaxial thin films (with x decreasing from 0.25 to 0.0) were deposited by pulsed laser deposition on (100)LaAlO_3 (LAO) single-crystal substrates covered with a conductive La_(0.5) Sr_(0.5)CoO_3 (LSCO) layer as a bottom electrode. X-ray and electron diffraction patterns demonstrate that the entire graded film has a single-crystal cubic structure. The epitaxial relationship between BST, LSCO, and LAO can be described as (100)_(BST)‖(100)_(LSCO)?(100)_(LAO); [001]_(BST)‖[001]_(LSCO)‖[001]_(LAO). Cross-sectional transmission electron microscopy (TEM) images reveal that both the BST films and the LSCO bottom electrodes have sharp interfaces and overall uniform thickness across the entire specimen, and that they grow with a columnar structure. Planar TEM images show that the graded films exhibit granular and/or polyhedral morphologies with an average grain size of 50 nm. High-resolution TEM images reveal aligned rectangular-shaped voids in the graded BST film, with length size of 12-17 nm, and width of 5-8 nm along the < 001 > direction in the (100) plane.
机译：通过脉冲激光沉积在覆盖有导电层的（100）LaAlO_3（LAO）单晶衬底上沉积成分渐变的（Ba_（1-x）Sr_x）TiO_3（BST）外延薄膜（x从0.25减小到0.0） La_（0.5）Sr_（0.5）CoO_3（LSCO）层作为底部电极。 X射线和电子衍射图表明整个梯度膜具有单晶立方结构。 BST，LSCO和LAO之间的外延关系可以描述为（100）_（BST）′（100）_（LSCO）（100）_（LAO）； [001] _（BST）‖[001] _（LSCO）‖[001] _（LAO）。横截面透射电子显微镜（TEM）图像显示BST膜和LSCO底部电极在整个样品上均具有清晰的界面和整体均匀的厚度，并且它们以柱状结构生长。平面TEM图像显示，梯度薄膜显示出颗粒和/或多面体形态，平均晶粒尺寸为50 nm。高分辨率TEM图像显示了梯度BST膜中对齐的矩形空隙，其长度尺寸为（12）100 nm的<001>方向上的长度为12-17 nm，宽度为5-8 nm。

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