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首页> 外文期刊>Journal of Applied Physics >Inhomogeneous probe surface induced effect in Kelvin probe force microscopy
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Inhomogeneous probe surface induced effect in Kelvin probe force microscopy

机译：在开尔文探针显微镜中的不均匀探针表面诱导效果

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摘要

The probe in Kelvin probe force microscopy (KPFM) may have an inhomogeneous tip surface by artificial modification or by unexpected wearing or contamination. In the present work, the non-equipotential tip surface induced effect in KPFM with conducting samples was simulated by an analytical multiple-capacitances model and a numerical boundary element model, respectively. The capacitance model showed that the KPFM system satisfies the principle of superposition without couplings between the inhomogeneous tip and inhomogeneous sample induced signals. In addition, the more precise boundary element model demonstrated that the non-uniform tip surface would not change the KPFM resolution but will induce a signal shift depending on tip-sample distance, tip oscillation amplitude, and modulation mode. In the simulations, a cantilever calibration factor of 3/8 was proposed based on the Euler-Bernoulli beam theory. Our simulation result is in good agreement with a recent KPFM distance spectroscopy experiment on a silver sample, and the simulation method is also promising for the future discussion about dielectric samples.
机译：Kelvin探针力显微镜（KPFM）中的探针可以通过人造改性或意外的穿着或污染具有不均匀的尖端表面。在本作工作中，通过分析多电容模型和数值边界元模型模拟具有导电样品的KPFM中的非等电位尖端表面诱导的效果。电容模型表明，KPFM系统满足叠加原理，而不均匀尖端和不均匀样品诱导信号之间的联接。另外，更精确的边界元模型表明，不均匀的尖端表面不会改变KPFM分辨率，而是将引起根据尖端样本距离，尖端振荡幅度和调制模式的信号移位。在模拟中，基于Euler-Bernoulli光束理论提出了3/8的悬臂校准因子。我们的仿真结果与最近的kPFM距离光谱试验良好的银色样本，仿真方法也有希望未来关于介电样本的讨论。

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  • 来源
    《Journal of Applied Physics》 |2020年第18期|184302.1-184302.11|共11页
  • 作者

    Die Xu; Gang Bai; Jinze Li; Wei Li;

  • 作者单位

    College of Electronic and Optical Engineering and College of Microelectronics Nanjing University of Posts and Telecommunications Nanjing 210023 China;

    College of Electronic and Optical Engineering and College of Microelectronics Nanjing University of Posts and Telecommunications Nanjing 210023 China;

    College of Electronic and Optical Engineering and College of Microelectronics Nanjing University of Posts and Telecommunications Nanjing 210023 China;

    College of Electronic and Optical Engineering and College of Microelectronics Nanjing University of Posts and Telecommunications Nanjing 210023 China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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