Mechanisms of radical production in radiofrequency discharges of CF3Cl, CF3Br, and certain other plasma etchants: Spectrum of a transient species

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Mechanisms of radical production in radiofrequency discharges of CF3Cl, CF3Br, and certain other plasma etchants: Spectrum of a transient species

机译：CF3Cl，CF3Br和某些其他等离子体蚀刻剂的射频放电中产生自由基的机理：瞬态物质的光谱

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Radiofrequency discharges in CF3Cl, CF3Br, and C2F6 emit a broad continuum centered at ∼614 nm. The variation of emission intensity with residence time, oxygen additions, power and pressure are evidence that this continuum originates from a common excited species produced by electron impact dissociation of the halocarbon feed gases. The hypothesis that this species is an excited state of the CF3 radical, which undergoes a transition to a repulsive state to yield CF2+F, is consistent with the spectral evidence and explains the presence of CF2 and unsaturated fluorocarbons in these discharges.

机译：CF3Cl，CF3Br和C2F6中的射频放电发出一个集中在〜614 nm处的宽连续体。发射强度随停留时间，氧气添加量，功率和压力的变化证明，该连续体起源于由卤代烃进料气体的电子碰撞解离产生的常见激发物种。该物质是CF3自由基的激发态，经历过渡到排斥态以生成CF2 + F的假设与光谱证据一致，并解释了这些放电中CF2和不饱和碳氟化合物的存在。

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《Journal of Applied Physics》 |1980年第11期|P.5688-5692|共5页
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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Mechanisms of radical production in radiofrequency discharges of CF3Cl, CF3Br, and certain other plasma etchants: Spectrum of a transient species

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