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首页> 外文期刊>Journal of Crystal Growth >Ion layer gas reaction (ILGAR)-conversion, thermodynamic considerations and related FTIR analyses
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Ion layer gas reaction (ILGAR)-conversion, thermodynamic considerations and related FTIR analyses

机译:离子层气体反应(ILGAR)转换,热力学考虑因素和相关的FTIR分析

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摘要

Recently ion layer gas reaction (ILGAR) has been introduced, a novel deposition technology of thin sulfide and oxide layers. Since there is typically incomplete conversion of the educt, thermodynamic calculations were carried out to elucidate the stability ranges of the desired products. It is only deeper in layers, where by -products are less easily removed and the situation resembles more a closed system, that the equilibrium can shift towards the educts. Interestingly, thermodynamic calculations predict e.g. zinc oxide as the stable product for the ILGAR oxide process Even at room temperature.
机译:最近,已经引入了离子层气体反应(ILGAR),这是一种薄的硫化物和氧化物层的新颖沉积技术。由于通常离析物转化不完全,因此进行了热力学计算以阐明所需产物的稳定性范围。只是在更深的层次上,其中副产物不易去除,而且情况更像是一个封闭的系统,平衡才能向离析物转移。有趣的是,热力学计算预测例如。氧化锌是ILGAR氧化工艺的稳定产品,即使在室温下也是如此。

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