Laser molecular beam epitaxy of BaTiO_3 and SrTiO_3 ultra thin films

H.B. Lu; N. Wang; W.Z. Chen; F. Chen; T. Zhao; H.Y. Peng; S.T. Lee; G.Z. Yang

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Laser molecular beam epitaxy of BaTiO_3 and SrTiO_3 ultra thin films

机译：BaTiO_3和SrTiO_3超薄膜的激光分子束外延

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摘要

BaTiO_3(BTO) and SrTiO_3(STO) ultra thin films of 1-10 unit cell layers are successfully fabricated on STO(001) substrates by laser molecular beam epitaxy. Measurements of atomic force microscopy (AFM), high-resolution transmission electron microscopy (HRTEM) and X-ray small-angle reflectivity reveal that the surfaces and interfaces are atom-level-smooth. The unit cell layers and the lattice structure are perfect.

机译：利用激光分子束外延技术成功地在STO（001）衬底上制备了1-10个晶胞层的BaTiO_3（BTO）和SrTiO_3（STO）超薄膜。原子力显微镜（AFM），高分辨率透射电子显微镜（HRTEM）和X射线小角反射率的测量表明，表面和界面是原子级光滑的。晶胞层和晶格结构是完美的。

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来源
《Journal of Crystal Growth》 |2000年第2期|p.173-177|共5页
作者
H.B. Lu; N. Wang; W.Z. Chen; F. Chen; T. Zhao; H.Y. Peng; S.T. Lee; G.Z. Yang;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类晶体学;
关键词
laser molecular beam epitaxy; oxide; ultra thin films;

机译：激光分子束外延;氧化物;超薄膜;

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1. Electrical properties of ferroelectric BaTiO_3 thin film on SrTiO_3 buffered GaAs by laser molecular beam epitaxy [J] . W. Huang, Z. P. Wu, J. H. Hao Applied Physicsletters . 2009,第3期

机译：激光分子束外延在SrTiO_3缓冲GaAs上的铁电BaTiO_3薄膜的电学性质
2. Epitaxial growth and strain relaxation of BaTiO_3 thin films on SrTiO_3 buffered (001) Si by molecular beam epitaxy [J] . F. Niu, B. W. Wessels Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2007,第3期

机译：分子束外延在SrTiO_3缓冲（001）Si上BaTiO_3薄膜的外延生长和应变松弛
3. Growth and surface analysis of BaTiO_3 ultrathin film fabricated by laser molecular beam epitaxy [J] . D.F. Cuia, Z.H. Chen, T. Zhao, Microelectronic Engineering . 2000,第期

机译：激光分子束外延制备BaTiO_3超薄膜的生长和表面分析
4. Properties of epitaxial SrTiO_3 thin films grown on silicon by molecular beam epitaxy [C] . Z. Yu, R. Droopad, J. Ramdani, Symposium on Ultrathin SiO_2 and High-K Materials for ULSI Gate Dielectrics held April 5-8, 1999, San Francisco, California, U.S.A. . 1999

机译：分子束外延在硅上生长的SrTiO_3外延薄膜的性能
5. Atomic construction of oxide thin films by laser molecular beam epitaxy [D] . Lei, Qingyu. 2016

机译：激光分子束外延氧化薄膜的原子施工
6. Combinatorial screening of halide perovskite thin films and solar cells by mask-defined IR laser molecular beam epitaxy [O] . Kazuhiro Kawashima, Yuji Okamoto, Orazmuhammet Annayev, 2017

机译：掩模定义的红外激光分子束外延对卤化钙钛矿薄膜和太阳能电池的组合筛选
7. Combinatorial screening of halide perovskite thin films and solar cells by mask-defined IR laser molecular beam epitaxy [O] . Kawashima Kazuhiro, Okamoto Yuji, Annayev Orazmuhammet, 2017

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8. Characterization of Copper Iodide Thin Films Fabricated via Laser AssistedMolecular Beam Epitaxy [R] . Weijekoon, W. M., Lyktey, M. Y., Prasd, P. N., 1993

机译：激光辅助分子束外延法制备碘化铜薄膜的表征

Laser molecular beam epitaxy of BaTiO_3 and SrTiO_3 ultra thin films

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