首页> 外文期刊>Journal of Crystal Growth >4H-SiC surface structure transitions during crystal growth following bunching in a fast sublimation process
【24h】

4H-SiC surface structure transitions during crystal growth following bunching in a fast sublimation process

机译:在快速升华过程中成束之后,晶体生长过程中4H-SiC表面结构过渡

获取原文
获取原文并翻译 | 示例
           

摘要

Kinetic Monte Carlo wurtzite structure crystals of 4H-SiC simulations were performed. The first stage of system evolution was the sublimation process which ended when bunched structure appeared. Then the crystal growth started. Vanishing of bunched structure and its transition to the double stepped one was observed on setting the proper parameters during growth up. For high incoming fluxes during growth 2D nucleation happened at wide terraces and surface debunching was blocked. Application of low resulting flux of incoming and out-coming particles have also blocked the surface smoothing process.
机译:进行了动力学动力学蒙特卡洛纤锌矿结构晶体的4H-SiC模拟。系统发展的第一阶段是升华过程,当束状结构出现时,升华过程结束。然后晶体开始生长。通过在生长过程中设定适当的参数,可以观察到束状结构的消失以及其向双台阶结构的转变。对于生长过程中的高通量通量,在较宽的阶地发生了2D成核作用,并且表面起泡被阻止。施加低的进,出颗粒通量也阻碍了表面的平滑处理。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号