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首页> 外文期刊>Journal of Crystal Growth >In situ X-ray diffraction monitoring during metalorganic vapor phase epitaxy growth of low-temperature-GaN buffer layer
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In situ X-ray diffraction monitoring during metalorganic vapor phase epitaxy growth of low-temperature-GaN buffer layer

机译:低温GaN缓冲层金属有机气相外延生长过程中的原位X射线衍射监测

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摘要

We investigated in situ X-ray diffraction (XRD) monitoring during the growth of low-temperature (LT)-GaN buffer layers on the (0001) c-plane sapphire substrates. The in situ XRD monitoring made it possible to observe the crystalline structures during their growth. We investigated the temperature dependence of LT-GaN buffer layers by in situ XRD monitoring during the thermal annealing of the LT-GaN layers. We clearly observed the evolution process, in which an LT-GaN buffer layer grown at 535 C was crystallized into a hexagonal structure by thermal annealing at temperatures of up to 1090 C. We also found that the LT-GaN buffer layer was transformed into nano size hexagonal single-crystal islands upon annealing by atomic force microscopy. The crystalline quality of the subsequent GaN layer strongly depended on the growth temperature of the LT-GaN buffer layer.
机译:我们研究了在(0001)c平面蓝宝石衬底上低温(LT)-GaN缓冲层的生长过程中的原位X射线衍射(XRD)监控。原位XRD监测使在生长过程中观察晶体结构成为可能。我们通过在LT-GaN层的热退火过程中进行原位XRD监测,研究了LT-GaN缓冲层的温度依赖性。我们清楚地观察到了演化过程,其中在535 C下生长的LT-GaN缓冲层通过在高达1090 C的温度下进行热退火而结晶为六边形结构。我们还发现LT-GaN缓冲层已转变为纳米结构。原子力显微镜退火后,形成尺寸为六边形的单晶岛。后续GaN层的晶体质量在很大程度上取决于LT-GaN缓冲层的生长温度。

著录项

  • 来源
    《Journal of Crystal Growth》 |2012年第2012期|1-4|共4页
  • 作者单位

    Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan;

    Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan;

    Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan;

    Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan;

    Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan;

    Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan;

    Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan;

    Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan,Akasaki Research Center, Nagoya University, Nagoya 464-8603, Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    A1. Crystal structure; A1. X-ray diffraction; A3. Metalorganic vapor phase epitaxy; B1. Nitrides;

    机译:A1。晶体结构A1。 X射线衍射;A3。金属有机气相外延;B1。氮化物;

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