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Annealing effects on the size,of Si-nanocrystals embedded in bulk SiO

机译:退火对块状SiO中纳米晶尺寸的影响

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摘要

In the process of synthesizing Si-nanocrystals (Si-nc) from bulk SiO, the relationship between Si-nc size distribution and annealing condition (temperature from 800 to 1150°C and time from 1 to 16 h) is experimentally investigated by X-ray diffraction and high resolution transmission electron microscopy. It is found that the average size of Si-ncs can be tuned through annealing condition from less than 3 nm to ~10nm, while the size distribution follows a lognormal function with an almost unchanged standard deviation of 0.2. After annealing at even higher temperature (1150 °C), two groups of Si-ncs with very different average sizes exist simultaneously and a double lognormal function should be applied to describe the size distribution.
机译:用块体SiO合成Si纳米晶体(Si-nc)的过程中,通过X-实验研究了Si-nc尺寸分布与退火条件(温度从800到1150°C,时间从1到16 h)之间的关系。射线衍射和高分辨率透射电子显微镜。已经发现,Si-ncs的平均尺寸可以通过退火条件从小于3 nm调整到〜10nm,而尺寸分布遵循对数正态函数,标准偏差几乎不变,为0.2。在更高温度(1150°C)退火后,两组同时存在平均尺寸差异很大的Si-ncs,应使用双对数正态函数来描述尺寸分布。

著录项

  • 来源
    《Journal of Crystal Growth》 |2011年第1期|p.191-195|共5页
  • 作者单位

    State Key Laboratory of Integrated Optoelectronics, Department of Electronic Engineering, Tsinghua University, Beijing 100084, China;

    State Key Laboratory of Integrated Optoelectronics, Department of Electronic Engineering, Tsinghua University, Beijing 100084, China;

    State Key Laboratory of Integrated Optoelectronics, Department of Electronic Engineering, Tsinghua University, Beijing 100084, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    A1. Nanostructures; A1. X-ray diffraction; B1. Oxides; B2. Semiconducting silicon;

    机译:A1。纳米结构;A1。 X射线衍射;B1。氧化物;B2。半导体硅;

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