Silver nanoparticles (NPs) were synthesized in thin surface layers of SiO2 glass by 70 keV implantation of Ag ions at a fluence of 5×1016 cm-2, and were then subjected to post thermal annealing in a temperature range of 400–800℃ at different atmospheres, e.g. Ar, N2, air. The evolution of surface morphologies, optical absorption prop-erties, as well as compositions and structures with annealing temperature in different annealing atmospheres were studied by AFM, UV-Vis spectrophotometry and GXRD. The results clearly show that uniformly distributed Ag NPs are observed in Ar ambient samples, which have high particle density and intense optical absorption at 700℃. Similar optical properties are obtained in N2 annealed samples with larger Ag NPs. In contrast, the formation and decomposi-tion of AgO significantly reduce optical absorption of air ambient samples. Moreover, the results of Rutherford back-scattering spectroscopy reveal that the evolution of Ag particles should be ascribed to different diffusion behaviors of Ag atoms with variation of annealing temperatures and atmospheres.%将70 keV的Ag离子以5×1016 cm-2的剂量注入到SiO2基底中,随后分别在400~800℃的Ar、N2、空气气氛中退火,详细研究了样品的表面形貌、光吸收特性、结构及成分随退火气氛及退火温度的变化规律。原子力显微镜、紫外-可见分光光度计及掠入射X射线衍射仪的测试结果显示：Ar气氛退火样品中形成的Ag纳米粒子(NPs)细小均匀,其颗粒密度在700℃时达到最大值,光吸收性能最佳；N2气氛退火引发Ag纳米颗粒的团聚生长,在样品近表面形成较大的Ag NPs,其颗粒密度也在700℃时达到最大值；而空气中退火后,由于AgO的形成、分解,样品的光吸收强度随退火温度升高持续下降。最后,卢瑟福背散射研究结果表明,样品的这些变化主要归因于Ag原子在不同退火气氛下随退火温度的扩散行为不同。
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