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首页> 外文期刊>Journal of Crystal Growth >Growth and microstructural features of laser ablated LiCoO_2 thin films
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Growth and microstructural features of laser ablated LiCoO_2 thin films

机译：激光烧蚀LiCoO_2薄膜的生长和微结构特征

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Thin films of LiCoO_2 were prepared by pulsed laser deposition technique and the properties were studied in relation to the deposition parameters. The films deposited from a sintered composite target (LiCoO_2+Li_2O) in an oxygen partial pressure of 100 mTorr and at a substrate temperature of 300 ℃ exhibited preferred c-axis (0 0 3) orientation perpendicular to the substrate surface. The AFM data demonstrated that the films are composed of uniform distribution of fine grains with an average grain size of 80 nm. The grain size increased with an increase in substrate temperature. The (0 0 3) orientation decreased with increase in (1 04) orientation for the films deposited at higher substrate temperatures (> 500 ℃) indicating that the films' growth is parallel to the substrate surface. The composition of the experimental films was analyzed using X-ray photoelectron spectroscopy (XPS). The binding energy peaks of Co(2p_(3/2)) and Co(2p_(1/2)) are, respectively, observed at 779.3 and 794.4 eV, which can be attributed to the Co~(3+) bonding state of LiCoO_2. The electrochemical measurements were carried out on Li//LiCoO_2 cells with a lithium metal foil as anode and LiCoO_2 film as cathode of 1.5 cm~2 active area using a Teflon home-made cell hardware. The Li//LiCoO_2 cells were tested in the potential range 2.6-4.2 V. Specific capacity as high as 205 mC/cm~2 μm was measured for the film grown at 700 ℃ The growth of LiCoO_2 films were studied in relation to the deposition parameters for their effective utilization as cathode materials in solid-state microbattery application.
机译：通过脉冲激光沉积技术制备了LiCoO_2薄膜，并研究了与沉积参数有关的性能。在100 mTorr的氧分压和300℃的基底温度下，从烧结的复合靶（LiCoO_2 + Li_2O）沉积的薄膜表现出垂直于基底表面的优选c轴（0 0 3）取向。原子力显微镜的数据表明，这些薄膜由均匀分布的细晶粒组成，平均晶粒尺寸为80 nm。晶粒尺寸随着基板温度的升高而增加。在较高的基材温度（> 500℃）下沉积的薄膜，其（0 0 3）取向随（1 04）取向的增加而降低，这表明该薄膜的生长与基材表面平行。使用X射线光电子能谱（XPS）分析了实验膜的组成。 Co（2p_（3/2））和Co（2p_（1/2））的结合能峰分别在779.3和794.4 eV处观察到，这可以归因于Co（2p_（3/2））的Co〜（3+）键合状态。 LiCoO_2。使用特氟龙自制的电池硬件，在锂金属箔作为阳极，锂金属膜作为阴极的Li // LiCoO_2电池上，进行了1.5 cm〜2的活性区域的电化学测量。在2.6-4.2 V的电位范围内测试了Li // LiCoO_2电池。在700℃下生长的薄膜的比电容高达205 mC / cm〜2μm。研究了LiCoO_2薄膜的生长与沉积的关系固态微电池应用中用作阴极材料的有效参数。

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