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Compensation effect of Mg-doped a- and c-plane GaN films grown by metalorganic vapor phase epitaxy

机译:金属有机气相外延生长的Mg掺杂a和c面GaN薄膜的补偿效应

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摘要

The electrical and optical properties of Mg-doped a- and c-plane GaN films grown by metalorganic vapor phase epitaxy were systematically investigated. The photoluminescence spectra of Mg-doped a-and c-plane GaN films exhibit strong emissions related to deep donors when Mg doping concentrations are above 1 ×10~(20)cm~(-3) and 5 × 10~(19)cm~(-3), respectively. The electrical properties also indicate the existence of compensating donors because the hole concentration decreases at such high Mg doping concentrations. In addition, we estimated the Nd/Na compensation ratio of a- and c-plane GaN by variable-temperature Hall effect measurement. The obtained results indicate that the compensation effect of the Mg-doped a-plane GaN films is lower than that of the Mg-doped c-plane GaN films.
机译:系统地研究了通过有机金属气相外延生长的Mg掺杂的a和c面GaN薄膜的电学和光学性质。当Mg掺杂浓度高于1×10〜(20)cm〜(-3)和5×10〜(19)cm时,掺杂Mg的a和c面GaN薄膜的光致发光光谱显示出与深施主有关的强发射。 〜(-3)。电学性能还表明存在补偿施主,因为在如此高的Mg掺杂浓度下空穴浓度会降低。此外,我们通过变温霍尔效应测量估算了a面和c面GaN的Nd / Na补偿比。所得结果表明,掺杂Mg的a面GaN膜的补偿效果低于掺杂Mg的c面GaN膜的补偿效果。

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  • 来源
    《Journal of Crystal Growth》 |2010年第21期|p.3131-3135|共5页
  • 作者单位

    Faculty of Science and Technology, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan;

    Faculty of Science and Technology, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan;

    Faculty of Science and Technology, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan;

    Faculty of Science and Technology, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan;

    Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan;

    Faculty of Science and Technology, Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    A1 Crystal structure; A1 Doping; B1 Nitrides; B2 Semiconducting gallium compounds;

    机译:A1晶体结构;A1掺杂;B1氮化物;B2半导体镓化合物;

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