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首页> 外文期刊>Journal of Crystal Growth >Excellent crystallinity of truly bulk ammonothermal GaN
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Excellent crystallinity of truly bulk ammonothermal GaN

机译:真正的块状单热GaN的出色结晶度

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In this paper we are presenting the excellent structural parameters of truly bulk gallium nitride crystals, which were grown by using the AMMONO-Bulk Method. In the crystals grown using this method a low dislocation density in the order of 5 × 10~3 cm~(-2) is readily attainable. At the same time the lattice of ammonothermally grown crystals is extremely uniform. Regardless of the crystal size, the radius of lattice curvature is higher than 100 m, whereas in the best crystals it is higher than 1000 m. Exceptional crystallinity is also evident in a very narrow X-ray (0002) rocking curves, with FWHM values of about 17 arcsec as measured by a standard Panalytical X'pert high-resolution diffractometer. Such excellent structural parameters of AMMONO-GaN crystals show clearly that truly bulk GaN can be grown by using a scalable method, which can be employed in mass production. The authors are convinced that crystals produced using their method will make a breakthrough in the manufacturing of high-power GaN-based devices.
机译:在本文中,我们介绍了使用AMMONO-Bulk方法生长的真正块状氮化镓晶体的出色结构参数。在使用这种方法生长的晶体中,很容易获得大约5×10〜3 cm〜(-2)的低位错密度。同时,氨热生长晶体的晶格非常均匀。无论晶体大小如何,晶格曲率半径均大于100 m,而在最佳晶体中,其大于1000 m。在非常窄的X射线(0002)摇摆曲线中也可以看到出色的结晶度,用标准Panalytical X'pert高分辨率衍射仪测得的FWHM值约为17 arcsec。如此出色的AMMONO-GaN晶体结构参数清楚地表明,可以通过使用可扩展的方法来生长真正的块状GaN,该方法可用于批量生产。作者坚信使用他们的方法生产的晶体将在高功率GaN基器件的制造方面取得突破。

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