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首页> 外文期刊>Journal of Crystal Growth >Vls Growth Of Gan Nanowires On Various Substrates
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Vls Growth Of Gan Nanowires On Various Substrates

机译:Vls在各种基底上生长Gan纳米线

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We have studied the vapour-liquid-solid (VLS) growth of free-standing GaN wires on various Ⅲ-Ⅴ substrates using metalorganic vapour phase epitaxy. The low-temperature deposition including in situ droplet formation was investigated applying 1.1-dimethylhydrazine and trimethylgallium. In particular, the surface structure of BP and GaN intermediate layers on the growth of GaN wires is discussed. Furthermore, the GaN growth was examined with a special focus on the influence of triethylboron on the droplet formation and wire growth. Additionally, the Au-initiated VLS growth on c-plane Al_2O_3 is reported, where NH_3 and triethylgallium have been used at usual growth conditions. Depending on the growth conditions used, the wires have hexagonal (h-GaN) wurtzite or cubic (c-GaN) zinc blende structure. The resulting nanowire diameters range from 50 to 300 nm and they are up to 2 urn in length.
机译:我们已经使用金属有机气相外延研究了在各种Ⅲ-Ⅴ型衬底上独立式GaN线的汽-液-固(VLS)生长。应用1.1-二甲基肼和三甲基镓研究了包括原位液滴形成在内的低温沉积。特别地,讨论了在GaN线的生长上的BP和GaN中间层的表面结构。此外,特别关注三乙基硼对液滴形成和焊丝生长的影响,研究了GaN的生长。另外,报道了在c平面Al_2O_3上Au引发的VLS生长,其中在通常的生长条件下使用了NH_3和三乙基镓。根据所用的生长条件,导线具有六角形(h-GaN)纤锌矿或立方(c-GaN)锌混合结构。最终的纳米线直径范围为50至300 nm,长度最大为2 um。

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