Scanning force microscopy and electron microscopy studies of pulsed laser depostied ZnO thin films: application to the bulk acoustic wavers (BAW) devices

P. Verardi; N. Nastase; C. Gherasim

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Scanning force microscopy and electron microscopy studies of pulsed laser depostied ZnO thin films: application to the bulk acoustic wavers (BAW) devices

机译：脉冲激光沉积ZnO薄膜的扫描力显微镜和电子显微镜研究：在体声波（BAW）器件中的应用

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摘要

New results concerning high crystalline ZnO this deposited on Si and sapphire substrates by laser ablation of Zn targets in oxygen reactive atmosphere are reported. Cross-section scanning electron microscopy (SEM) studies clearly evidenced a columnar structure of the layer. As a result ofthe preparation technique for TEM studies, the film is breaking into separate columnar groups: the ZnO columns observed are 100-500 nm thick, depending on the deposition conditions.

机译：报道了有关在氧反应性气氛中通过激光烧蚀Zn靶在硅和蓝宝石衬底上沉积高结晶ZnO的新结果。截面扫描电子显微镜（SEM）研究清楚地证明了该层的柱状结构。作为用于TEM研究的制备技术的结果，该膜被分为独立的柱状组：观察到的ZnO柱厚为100-500 nm，具体取决于沉积条件。

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来源
《Journal of Crystal Growth》 |1999年第3期|p.523-528|共6页
作者
P. Verardi; N. Nastase; C. Gherasim;
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作者单位

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类晶体学;
关键词
ZnO; Thin film; Scanning force microscopy; Piezoelectric properties;

机译：氧化锌;薄膜;扫描力显微镜压电特性;

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4. Scanning force microscopy and electron microscopy studies of pulsed laser deposited ZnO thin films: application to the bulk acoustic waves (BAW) devices [C] . P.Verardi, N.Nastase, C.Gherasim, Symposium C on growth, characterisation and applications of bulk II-VIs of the E-MRS 1998 spring conference . 1999

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Scanning force microscopy and electron microscopy studies of pulsed laser depostied ZnO thin films: application to the bulk acoustic wavers (BAW) devices

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