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首页> 外文期刊>Journal of Crystal Growth >Formation of an MN-type cubic nitride phase in reactively sputtered stainless steel-nitrogen films
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Formation of an MN-type cubic nitride phase in reactively sputtered stainless steel-nitrogen films

机译：反应溅射不锈钢-氮膜中MN型立方氮化物相的形成

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摘要

Stainless steel films doped with various amounts of nitrogen were deposited on (100) silicon wafers by radio frequency magnetron sputtering of an austenitic stainless steel target in argon and nitrogen gas mixtures, containing a range of nitrogen compositions. The evolution of phases as a function of nitrogen doping was studied by X-ray diffraction and transmission electron microscopy. It was found that with increasing nitrogen composition in the gas mixture, the crystalline structure of the films changed from bcc ferrite (α), to expanded fcc austenite (γ_N) supersaturated with nitrogen, and finally to the MN type nitride (Fe_(0.69)Cr_(0.2)Ni_(0.1)Mo_(0.01))N phase with ideal cubic symmetry and further enlarged lattice. This MN type phase has a fcc structure with a lattice parameter about 0.433 nm and possibly possesses the zinc blende type lattice structure. The morphological features of the single MN phase films produced are also discussed in this paper.
机译：通过射频奥氏体不锈钢靶材在氩气和氮气混合物中进行射频磁控溅射，将掺杂有不同数量氮的不锈钢膜沉积在（100）硅晶片上，该氩气和氮气混合物中含有多种氮元素。通过X射线衍射和透射电子显微镜研究了作为氮掺杂的函数的相的演变。结果发现，随着混合气体中氮含量的增加，薄膜的晶体结构从bcc铁素体（α）转变为过饱和的fcc奥氏体（γ_N），最后转变为MN型氮化物（Fe_（0.69） Cr_（0.2）Ni_（0.1）Mo_（0.01））N相具有理想的立方对称性，晶格进一步扩大。该MN型相具有晶格参数为约0.433nm的fcc结构，并且可能具有锌共混物型晶格结构。本文还讨论了产生的单MN相膜的形态特征。

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