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首页> 外文期刊>Journal of Crystal Growth >Kinetics of dislocation-mediated strain relaxation in InGaAs/GaAs heteroepitaxy
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Kinetics of dislocation-mediated strain relaxation in InGaAs/GaAs heteroepitaxy

机译:InGaAs / GaAs异位反应中位错介导的应变弛豫动力学

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摘要

The relaxation of InGaAs/GaAs thin films grown by molecular beam epitaxy is studied by an in situ optical stress sensor technique. Profiles of normalized film strain versus thickness are obtained for several growth temperatures and two InGaAs compositions. The profiles are modeled using Dodson and Tsao's concept of effective stress, and a new kinetic model of dislocation sources associated with the surface roughness, which could be generated by film growth and have a transient response following a growth interrupt.
机译:通过原位光应力传感器技术研究了分子束外延生长的InGaAs / GaAs薄膜的弛豫。对于几种生长温度和两种InGaAs成分,获得了归一化膜应变与厚度的关系曲线。这些轮廓使用Dodson和Tsao的有效应力概念以及与表面粗糙度相关的位错源的新动力学模型进行建模,该模型可以由薄膜生长生成,并在生长中断后具有瞬态响应。

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