Well-aligned carbon nanotube array grown on Si-based nanoscale SiO_2 islands

Y.F. Mei; X.L. Wu; X.F. Li; X.M. Bao; X.Z. Wang; Z. Hu; G.G. Siu

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Well-aligned carbon nanotube array grown on Si-based nanoscale SiO_2 islands

机译：在硅基纳米SiO_2岛上生长的取向良好的碳纳米管阵列

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摘要

Well-aligned carbon nanotube (CNT) array grown on Si-based nanoscale SiO_2 islands was obtained by microwave plasma-enhanced chemical vapor deposition under low temperature of 520℃. Atomic force microscope observation and Raman spectroscopic analysis disclosed the formation of the CNTs. The SiO_2 islands formed by excess anodization of Si-based Al film were found to be the growth points of the CNTs, which was confirmed by the C-V curves without charge characteristics. Position-controllable growth of CNTs was attempted on silicon substrate so as to explore significant applications in nanoelectronics and nanodevices.

机译：通过在520℃的低温下进行微波等离子体增强化学气相沉积，获得了在Si基纳米SiO_2岛上生长的取向良好的碳纳米管阵列。原子力显微镜观察和拉曼光谱分析揭示了碳纳米管的形成。发现通过过度阳极氧化Si基Al膜形成的SiO 2岛是CNT的生长点，这由没有电荷特性的C-V曲线证实。尝试在硅衬底上控制碳纳米管的位置生长，以探索在纳米电子学和纳米器件中的重要应用。

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来源
《Journal of Crystal Growth》 |2003年第4期|p.414-418|共5页
作者
Y.F. Mei; X.L. Wu; X.F. Li; X.M. Bao; X.Z. Wang; Z. Hu; G.G. Siu;
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作者单位

National Laboratory of Solid State Microstructures, Department of Physics, Nanjing University, Han Kou Road 22, Nanjing 210093, People's Republic of China;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类晶体学;
关键词
A1. nanostructures; A3. chemical vapor deposition processes; B2. semi-conducting aluminum compounds;

机译：A1。纳米结构;A3。化学气相沉积过程;B2。半导体铝化合物;

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1. Ultrahigh-current field emission from sandwich-grown well-aligned uniform multi-walled carbon nanotube arrays with high adherence strength [J] . Zexiang Chen, Qiang Zhang, Pinxiong Lan Nanotechnology . 2007,第26期

机译：具有高粘附强度的三明治生长的排列良好的均匀多壁碳纳米管阵列的超大电流场发射
2. Ultrahigh-current field emission from sandwich-grown well-aligned uniform multi-walled carbon nanotube arrays with high adherence strength [J] . Chen ZX, Zhang Q, Lan PX, Nanotechnology . 2007,第26期

机译：具有高粘附强度的三明治生长的排列良好的均匀多壁碳纳米管阵列的超大电流场发射
3. Violet photoluminescence from Ge+-implanted Si-based nanoscale SiO2 islands array [J] . Zou JP., Mei YF., Shen JK., Physics Letters, A . 2002,第1a2期

机译：Ge +注入的硅基纳米SiO2岛阵列的紫光致发光
4. Modification of well-aligned carbon nanotubes grown on AAO template by chemical vapor depostion [C] . Chen Leishan International conference on biotechnology, chemical and materials engineering . 2013

机译：通过化学气相沉积改性在AAO模板上生长的排列良好的碳纳米管
5. Chemistry of nanoscale carbon materials: Gas-phase purification of single-wall carbon nanotubes, synthesis of nanoscale carbon nitrides, and nanodiamonds in meteorite carbon with related diamond surface chemistry. [D] . Zimmerman, John Lynn. 2000

机译：纳米碳材料的化学：单壁碳纳米管的气相纯化，陨石碳中纳米碳氮化物和纳米金刚石的合成以及相关的金刚石表面化学。
6. Properties of Retinal Precursor Cells Grown on Vertically Aligned Multiwalled Carbon Nanotubes Generated for the Modification of Retinal Implant-Embedded Microelectrode Arrays [O] . Sandra Johnen, Frank Meißner, Mario Krug, 2016

机译：在垂直排列的多壁碳纳米管上生长的视网膜前体细胞的性质用于修饰植入视网膜植入的微电极阵列。
7. Synthesis of Large Arrays of Well-Aligned Carbon Nanotubes on Glass [O] . Z. F. Ren 1998

机译：玻璃上稳定排列碳纳米管大阵列的合成
8. Synthesis of Large Arrays of Well-Aligned Carbon Nanotubes on Glass; Science [R] . Bush, P. , Huang, Z. P. , Provencio, P. N. , 1998

机译：在玻璃上合成大排列的良好排列的碳纳米管;科学

Well-aligned carbon nanotube array grown on Si-based nanoscale SiO_2 islands

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