Electro-thermal Stimuli for MEMS Testing in FSBM Technology

N. Dumas; F. Azaïs; L. Latorre; P. Nouet

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Electro-thermal Stimuli for MEMS Testing in FSBM Technology

机译：FSBM技术中用于MEMS测试的电热激励

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The development of low-cost goo-go procedures for MEMS production testing is one of the main issues of MEMS manufacturability. In particular, the generation of low-cost test stimuli is a real challenge. In this paper, we investigate the generation of electrically-induced thermal stimuli to test electro-mechanical structures. Static, transient and harmonic responses are studied and it is demonstrated that they can be used for efficient detection and classification of several faulty devices.

机译：MEMS生产测试的低成本通过/不通过程序的开发是MEMS可制造性的主要问题之一。特别是，低成本测试刺激的产生是一个真正的挑战。在本文中，我们研究了电感应热刺激的产生，以测试机电结构。研究了静态，瞬态和谐波响应，并证明它们可用于有效检测和分类几种故障设备。

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来源
《Journal of Electronic Testing》 |2006年第2期|189-198|共10页
作者
N. Dumas; F. Azaïs; L. Latorre; P. Nouet;
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作者单位

LIRMM University of Montpellier/CNRS;

LIRMM University of Montpellier/CNRS;

LIRMM University of Montpellier/CNRS;

LIRMM University of Montpellier/CNRS;

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原文格式 PDF
正文语种 eng
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关键词
MEMS; bulk micromachining; defects; testing; electro-thermal stimuli;

机译：MEMS;批量微加工;缺陷;测试;电热刺激;

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专利

1. Electro-thermal Stimuli for MEMS Testing in FSBM Technology [J] . N. DUMAS, F. AZAIS, L. LATORRE, Journal of Electronic Testing: Theory and Applications: Theory and Applications . 2006,第2期

机译：FSBM技术中用于MEMS测试的电热激励
2. TOTAL E&P CANADA TO HELP FUND E-T EN ELECTRO-THERMAL TECHNOLOGY TESTING [J] . Oilsands Review group Oilsands review . 2011,第6期

机译：加拿大E＆P总计将帮助E-T进行电热技术测试
3. Fabrication and testing of a MEMS platform for characterization of stimuli-sensitive hydrogels [J] . Tiannan Guan, Frederik Ceyssens, Robert Puers Journal of Micromechanics and Microengineering . 2012,第8期

机译：用于表征刺激敏感水凝胶的MEMS平台的制造和测试
4. Towards on-line testing of MEMS using electro-thermal excitation [C] . Mailly F., Azais F., Dumas N., Test Symposium, 2005. European . 2005

机译：使用电热激励进行MEMS的在线测试
5. Implementing and testing a novel refreshable Braille display system (RBDS) utilizing micro-electro-mechanical systems (MEMS) technology. [D] . Yobas, Levent. 2001

机译：利用微机电系统（MEMS）技术实施和测试新型可刷新盲文显示系统（RBDS）。
6. Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor [O] . Dongpeng Zhang, Anjiang Cai, Yulong Zhao, 2021

机译：V形电热MEMS执行器与人为误差因子的宏观建模
7. Electrically Induced Stimuli For MEMS Self-Test [O] . Charlot Mir Parrain, B. Charlot, S. Mir, 2001

机译：MEMS自检的电激励
8. Sandia MEMS Passive Shock Sensor : FY08 testing for functionality, model validation, and technology Readiness [R] . Walraven, J. A., Blecke, J., Baker, M. S., 2008

机译：sandia mEms无源冲击传感器：FY08测试功能，模型验证和技术准备

Electro-thermal Stimuli for MEMS Testing in FSBM Technology

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