The fabrication of nanopatterns with a focussed ion beam (FIB) has recently been expanded to more complex nanopatterns with large numbers of individual pattern elements and covering larger pattern areas. We present two examples of FIB-fabricated large and complex nanopatterns and describe the key aspects of the underlying process automation. The FIB-fabrication has been carried out on DualBeam⢠instruments, which combine the FIB with a scanning electron microscope in one single instrument. We also present examples on how FIB-cross-sectioning and high-resolution electron microscopy can be applied to characterise the just fabricated nanopatterns in great detail.View full textDownload full textKeywordsDualBeamâ¢, nanopatterning, nanoprototyping, nanofabrication, FIBRelated var addthis_config = { ui_cobrand: "Taylor & Francis Online", services_compact: "citeulike,netvibes,twitter,technorati,delicious,linkedin,facebook,stumbleupon,digg,google,more", pubid: "ra-4dff56cd6bb1830b" }; Add to shortlist Link Permalink http://dx.doi.org/10.1080/17458080903487448
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