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首页> 外文期刊>Journal of Heat Transfer >A Heat Transfer Model for Graphene Deposition on Ni and Cu Foils in a Roll-to-Roll Plasma Chemical Vapor Deposition System
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A Heat Transfer Model for Graphene Deposition on Ni and Cu Foils in a Roll-to-Roll Plasma Chemical Vapor Deposition System

机译:轧辊等离子体化学气相沉积系统Ni和Cu箔上石墨烯沉积的传热模型

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摘要

High-throughput production is a major bottleneck for integration of graphene-based technologies in existing and future applications. Here, a semi-empirical heat transfer model is developed to optimize large-scale deposition of graphene on Ni and Cu foils in a roll-to-roll (R2R) plasma chemical vapor deposition (CVD) system. Temperature distributions in Ni and Cu foils during deposition are recorded with in situ temperature measurements using near-IR optical emission spectroscopy. The model indicates that foil movement significantly affects the temperature distribution and the cooling rate of the foil. Consequently, graphene growth on Cu is limited to lower web speeds for which the foil temperature is higher, and the residence time in the plasma is longer. On the other hand, graphene can be deposited on Ni at relatively higher web speeds due to moderately high diffusion rate of carbon in Ni and increased cooling rates up to 20 K/s with higher web speed. Critical limitations in the production rates of graphene using R2R CVD process exist due to significant effects of web speed on the temperature distribution of the substrate. The thermal analysis approach reported here is expected to aid in enhancing the throughput of graphene production in R2R CVD systems.
机译:高吞吐量生产是在现有和未来的应用中集成基于石墨烯的技术的主要瓶颈。这里,开发了半经验传热模型,以优化石墨烯的大规模沉积在卷 - 卷(R2R)等离子体化学气相沉积(CVD)系统中的Ni和Cu箔上。沉积过程中Ni和Cu箔的温度分布是使用近红外光发射光谱的原位温度测量记录。该模型表示箔片运动显着影响箔的温度分布和冷却速率。因此,在Cu石墨烯生长被限制,以降低网络速度的量,箔温度较高,并且在等离子体中的停留时间较长。另一方面,由于Ni中的碳的中度高扩散速率,并且增加了高达20k / s的幅材速度,因此可以以相对较高的纤维速率沉积石墨烯。在使用R2R CVD工艺石墨烯的生产速率限制临界存在由于纸幅速度的在所述衬底的温度分布显著影响。预计报告的热分析方法有助于提高R2R CVD系统中石墨烯生产的产量。

著录项

  • 来源
    《Journal of Heat Transfer》 |2021年第10期|103401.1-103401.11|共11页
  • 作者单位

    School of Mechanical Engineering Purdue University West Lafayette IN 47907 Birck Nanotechnology Center Purdue University West Lafayette IN 47907;

    Mechanical and Aerospace Engineering Department University of California Los Angeles CA 90095;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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