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首页> 外文期刊>Journal oflaser Applications >Femtosecond laser micromachining and application of hot embossing molds for microfluid device fabrication
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Femtosecond laser micromachining and application of hot embossing molds for microfluid device fabrication

机译：飞秒激光微加工及其在热压模具中的应用

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摘要

Femtosecond laser micromachining was used to create microfluid channel patterns on AISI 304L stainless steel to fabricate hot embossing mold patterns. To characterize the machining process, measurements of single pulse ablation spots with pulse energies from 13 to 500 nJ were used to determine ablation threshold as 0.19 J/cm~2. The volume of material removed per pulse increased steadily with pulse energy but ablation efficiency relative to the evaporation enthalpy of removed material had its maximum value of 2% at 65 nJ. Molds with fluid channel features 12 μm deep and as narrow as 8 μm wide could be machined by laser ablation. A mold with channels 75 μm wide and 10 μm deep was machined and used to emboss a microfluidic micromolecular magnetic separator pattern in polymethyl macryolate polymer.
机译：飞秒激光微加工用于在AISI 304L不锈钢上创建微流体通道图案，以制造热压花模具图案。为了表征加工过程，使用脉冲能量在13到500 nJ之间的单脉冲消融点的测量将消融阈值确定为0.19 J / cm〜2。每个脉冲去除的材料量随脉冲能量稳定增加，但是相对于去除的材料的蒸发焓，消融效率在65 nJ时具有2％的最大值。可以通过激光烧蚀加工出具有流体通道特征的模具，​​该模具的深度为12μm，宽度为8μm。加工具有75μm宽和10μm宽的通道的模具，并用于在聚甲基丙烯酸甲酯聚合物中压印微流体微分子磁性分离器图案。

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  • 来源
    《Journal oflaser Applications》 |2009年第4期|p.196-204|共9页
  • 作者

    Hae Woon Choi; Seon Bong; Dave F. Farson; Chunmeng Lu; L. James Lee;

  • 作者单位

    Department of Mechanical and Automotive Engineering, Keimvung University, Daegu, Republic of Korea 704-701;

    Department of Mechanical and Automotive Engineering, Keimvung University, Daegu, Republic of Korea 704-701;

    Laboratory for Multiscale Processing and Characterization, The Ohio State University, 1248 Arthur E Adams Dr, Columbus, Ohio 43221;

    Department of Chemical and Biomolecular Engineering, The Ohio State University, 140 W 19th Ave, Columbus, Ohio 43210;

    Department of Chemical and Biomolecular Engineering, The Ohio State University, 140 W 19th Ave, Columbus, Ohio 43210;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    femtosecond laser micromachining; hot embossing mold; microfluidic channel;

    机译：飞秒激光微加工;热压模;微流体通道;

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