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Nanoindentation of high-purity vapor deposited lithium films: The elastic modulus

机译：高纯度气相沉积锂薄膜的纳米压痕：弹性模量

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摘要

Nanoindentation has been used to measure the elastic modulus of 5 and 18 m thick high-purity vapor deposited polycrystalline lithium films at 31 degrees C. Over indentation depths ranging from 150 to 1100 nm, the modulus is found to vary with film thickness from 9.8 GPa +/- 11.9% to 8.2 GPa +/- 14.5%. These results are well within the range of lithium's orientation dependent elastic modulus, which spans approximately 3.1 to 21.4 GPa. The measured values may also indicate (111) and (100) texture for the 5 and 18 m thick films, respectively. The potential effects of pileup and surface contamination are found to be negligible if any at all. Small but discernible changes in damping capability near the free surface may provide insight into the subsurface defect structure and the potential for localized heating. Numerous experimental challenges are addressed and key metrics are used to validate the measured elastic modulus.
机译：纳米压痕已被用于在31摄氏度下测量5和18 m厚的高纯度气相沉积多晶锂薄膜的弹性模量。在150至1100 nm的压痕深度范围内，模量随9.8 GPa的膜厚度而变化+/- 11.9％至8.2 GPa +/- 14.5％。这些结果很好地在锂的取向依赖性弹性模量范围内，该范围大约为3.1至21.4 GPa。测量值还可分别指示5和18 m厚膜的（111）和（100）纹理。发现堆积和表面污染的潜在影响可以忽略不计。自由表面附近阻尼能力的微小但可辨别的变化可能会提供对地下缺陷结构和局部加热潜力的了解。解决了许多实验难题，关键指标用于验证测得的弹性模量。

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