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首页> 外文期刊>Journal of Materials Research >Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides
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Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides

机译：将反应溅射与快速热处理相结合以合成和发现金属氮氧化物

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摘要

Recent efforts have demonstrated enhanced tailoring of material functionality with mixed anion materials, yet exploratory research with mixed anion chemistries is limited by the sensitivity of these materials to synthesis conditions. Synthesis of a particular metal oxynitride compound by traditional reactive annealing requires specific, limited ranges of both oxygen and nitrogen chemical potentials to establish equilibrium between the solid-state material and a reactive atmosphere. Using Ta-O-N as an example system, we describe a combination of reactive sputter deposition and rapid thermal processing (RTP) for synthesis of mixed anion inorganic materials. Heuristic optimization of reactive gas pressures to attain a desired anion stoichiometry is discussed, and the ability of RTP to enable amorphous to crystalline transitions without preferential anion loss is demonstrated through the controlled synthesis of nitride, oxide, and oxynitride phases.
机译：最近的努力表明，使用混合阴离子材料增强了材料功能的定制，但是使用混合阴离子化学物质进行的探索性研究受到这些材料对合成条件敏感性的限制。通过传统的反应性退火合成特定的金属氧氮化物化合物需要特定，有限范围的氧和氮化学势，以在固态材料和反应性气氛之间建立平衡。使用Ta-O-N作为示例系统，我们描述了反应溅射沉积与快速热处理（RTP）的组合，用于合成混合阴离子无机材料。讨论了反应性气体压力的启发式优化，以实现所需的阴离子化学计量，并通过氮化物，氧化物和氧氮化物相的受控合成，证明了RTP能够实现无定形至结晶过渡而无优先阴离子损失的能力。

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  • 来源
    《Journal of Materials Research》 |2015年第19期|2928-2933|共6页
  • 作者

    Lan Zhou; Santosh K. Suram; Natalie Becerra-Stasiewicz; Slobodan Mitrovic; Kevin Kan; Ryan J.R. Jones; John M. Gregoire;

  • 作者单位

    Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, USA;

    Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, USA;

    Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, USA;

    Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, USA;

    Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, USA;

    Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, USA;

    Joint Center for Artificial Photosynthesis, California Institute of Technology, Pasadena, California 91125, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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