机译:通过电子束光刻和反应离子刻蚀制备的碳氧化硅纳米线阵列发出的强大可见光
Colleges of Nanoscale Sciences and Engineering, State University of New York Polytechnic Institute, Albany, New York 12203, USA;
Colleges of Nanoscale Sciences and Engineering, State University of New York Polytechnic Institute, Albany, New York 12203, USA;
Colleges of Nanoscale Sciences and Engineering, State University of New York Polytechnic Institute, Albany, New York 12203, USA;
IBM Microelectronics, Semiconductor Research and Development Center, Hopewell Junction, New York 12533, USA;
Colleges of Nanoscale Sciences and Engineering, State University of New York Polytechnic Institute, Albany, New York 12203, USA;
Colleges of Nanoscale Sciences and Engineering, State University of New York Polytechnic Institute, Albany, New York 12203, USA;
机译:通过反应性离子束刻蚀制备的对准的类金刚石碳纳米棒阵列增强的场电子发射
机译:垂直排列的锥形锥形的制造和现场 - 排放性能通过纳米光刻标记和无电催化蚀刻制备的垂直对准锥形[110] Si纳米线阵列
机译:电子束光刻和反应离子刻蚀在硅上制备菲涅耳环微阵列
机译:自上而下的方法:使用扫描电子显微镜基电子束光刻方法和电感耦合等离子体反应离子蚀刻制造硅纳米线
机译:通过用于冷场排放的反应离子蚀刻硅纳米尖阵的形状调谐
机译:金属辅助化学蚀刻的无光刻技术制造硅纳米线和纳米孔阵列
机译:通过电子束光刻图案化并通过干法蚀刻定义的TiN / Ni纳米点阵列上单个碳纳米管的生长,用于场发射应用