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Plastic response of the native oxide on Cr and Al thin films from in situ conductive nanoindentation

机译:原位导电纳米压痕对Cr和Al薄膜上天然氧化物的塑性响应

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摘要

Thin native oxide layers can dominate the mechanical properties of metallic thin films. However, to date there has been little quantification of how such overlayers affect yield and fracture during indentation in constrained film systems. To gain insight into such processes, electrical contact resistance was measured in situ during nanoindentation on constrained thin films of epitaxial Cr and polycrystalline Al, both possessing a native oxide overlayer. Measurements during loading of the films show both increases and decreases in current, which can then be used to distinguish between various sources of plasticity. Ex situ measurements of the oxide thickness are used to provide a starting point for elasticity simulations of stress in both systems. The results show that dislocation nucleation in the metal film can be differentiated from oxide fracture during indentation.
机译:薄的天然氧化物层可以控制金属薄膜的机械性能。然而,迄今为止,在约束薄膜系统中,在压痕期间,这种覆盖层如何影响屈服和断裂的量化程度还很小。为了深入了解此类工艺,在纳米压痕过程中,在均具有天然氧化物覆盖层的外延Cr和多晶Al的受限薄膜上,就地测量了电接触电阻。薄膜加载过程中的测量表明电流增加和减少,然后可用于区分各种可塑性来源。氧化物厚度的异位测量用于为两个系统中的应力弹性模拟提供起点。结果表明,金属膜中的位错形核可与压痕过程中的氧化物断裂区分开。

著录项

  • 来源
    《Journal of Materials Research》 |2012年第4期|p.685-693|共9页
  • 作者单位

    Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455;

    Hysitron, Inc., Minneapolis, Minnesota 55344;

    Hysitron, Inc., Minneapolis, Minnesota 55344;

    Characterization Facility, University of Minnesota, Minneapolis, Minnesota 55455;

    Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455;

    Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455;

    Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455;

    Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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