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The Snomipede: A parallel platform for scanning near-field photolithography

机译:Snomipede:用于扫描近场光刻的并行平台

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摘要

Using scanning near-field lithography (SNP), it is possible to pattern molecules at surfaces with a resolution as good as 9 nm [M. Montague, R. E. Ducker, K. S. L. Chong, R. J. Manning, F. J. M. Rutten, M. C. Davies and G. J. Leggett, Langmuir 23 (13), 7328-7337 (2007)]. However, in common with other scanning probe techniques, SNP has previously been considered a serial process, hindering its use in many applications. IBM's "Millipede" addresses this problem by utilizing an array of local probes operating in parallel. Here, we describe the construction of two instruments (Snomipedes) that integrate near-field optical methods into the parallel probe paradigm and promise the integration of top-down and bottom-up fabrication methods over macroscopic areas. Both are capable of performing near-field lithography with 16 probes in parallel spanning approximately 2 mm. The instruments can work in both ambient and liquid environments, key to many applications in nanobiology. In both, separate control of writing is possible for each probe. We demonstrate the deprotection of self-assembled monolayers of alkylsilanes with photocleavable protecting groups and subsequent growth of nanostructured polymer brushes from these nanopatterned surfaces by atom-transfer radical polymerization.
机译:使用扫描近场光刻(SNP),可以以高达9 nm [M. Montague,R. E. Ducker,K. S. L. Chong,R. J. Manning,F. J. M. Rutten,M. C. Davies和G. J. Leggett,Langmuir 23(13),7328-7337(2007)]。但是,与其他扫描探针技术一样,SNP以前被认为是串行过程,因此阻碍了其在许多应用中的使用。 IBM的“ Millipede”通过利用并行运行的一系列本地探测器解决了这个问题。在这里,我们描述了将近场光学方法集成到并行探针范式中的两种仪器(Snomipedes)的构造,并保证了在宏观区域上自顶向下和自底向上制造方法的集成。两者都能够用16个平行的探头进行近场光刻,跨度约2 mm。该仪器可在环境和液体环境中工作,这是纳米生物学许多应用的关键。在两种情况下,每个探针都可以分别控制写入。我们展示了具有光可裂解保护基团的烷基硅烷自组装单分子层的脱保护作用,以及随后通过这些原子转移的自由基聚合作用,从这些纳米图案化的表面上生长了纳米结构的聚合物刷。

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  • 来源
    《Journal of Materials Research》 |2011年第24期|p.2997-3008|共12页
  • 作者单位

    Department of Chemistry, University of Sheffield, Sheffield S3 7HF, United Kingdom;

    School of Pharmacy, University of Nottingham, Nottingham NG7 2RD, United Kingdom;

    Department of Electronics and Electrical Engineering, University of Glasgow, Glasgow G12 8LT, United Kingdom;

    Department of Chemistry, Faculty of Science, Universiti Putra Malaysia, 43400 UPM Seraang, Selangor, Malaysia;

    School of Chemistry and Manchester Interdisciplinary Biocentre, The University of Manchester,Manchester Ml 7DN, United Kingdom;

    Department of Physics and Astronomy, University of Sheffield, Sheffield S3 7RH, United Kingdom;

    Department of Chemistry, University of Sheffield, Sheffield S3 7HF, United Kingdom;

    School of Chemistry, The University of Manchester, Manchester Ml3 9PL, United Kingdom Manchester Interdisciplinary Biocentre, The University of Manchester, Manchester Ml 7DN, United Kingdom;

    School of Pharmacy, University of Nottingham, Nottingham NG7 2RD, United Kingdom;

    Department of Electronics and Electrical Engineering, University of Glasgow, Glasgow G12 8LT, United Kingdom;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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