Parallel scanning near-field photolithography in liquid: The Snomipede

著录项

• 来源
  《Microelectronic Engineering》 |2011年第8期|p.2109-2112|共4页
• 作者

  Zhuming Liu; Ehtsham ul-Haq; Jamie K. Hobbs; Graham J. Leggett; Yuan Zhang; John M.R. Weaver; CliveJ. Roberts;

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• 作者单位

  Laboratory of Biophysics and Surface Analysis, The School of Pharmacy, The University of Nottingham, Nottingham NC7 2RD, UK;

  Department of Physics and Astronomy, University of Sheffield, Hicks Building, Hounsfield Road, Sheffield S3 7RH, UK;

  Department of Physics and Astronomy, University of Sheffield, Hicks Building, Hounsfield Road, Sheffield S3 7RH, UK;

  Department of Chemistry, University of Sheffield, Brook Hill, Sheffield S3 7HF, UK;

  Department of Electronics and Electrical Engineering Rankine Building, University of Glasgow, Glasgow C12 8LT, UK;

  Department of Electronics and Electrical Engineering Rankine Building, University of Glasgow, Glasgow C12 8LT, UK;

  Laboratory of Biophysics and Surface Analysis, The School of Pharmacy, The University of Nottingham, Nottingham NC7 2RD, UK;

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• 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  parallel scanning near-field; photolithography; liquid lithography; snomipede;

  机译：平行扫描近场光刻液相光刻鼻模;