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首页> 外文期刊>Journal of Materials Research >Controlling electromigration to selectively form thin metal wires and metal microspheres
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Controlling electromigration to selectively form thin metal wires and metal microspheres

机译:控制电迁移以选择性地形成细金属线和金属微球

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摘要

Guidelines for selecting the shape formed by metal discharged from a narrow Al line were developed. By controlling electromigration in the line, either relatively large microspheres, thin wires, or relatively small microspheres could be formed. Our starting point was a passivated polycrystalline Al line with a slit and small holes at the anode end of it. In the discussion, we describe how the temperature of a part of a wire, T~*, at the moment when the part is completely discharged from the hole, affects the shape of the microstructural feature formed from the metal. High, intermediate, and low values of T~* were found to correspond to the formation of large microspheres, thin wires, and small microspheres, respectively. The experimental results are explained in the discussion.
机译:制定了选择由窄铝线排出的金属形成的形状的准则。通过控制管线中的电迁移,可以形成相对较大的微球,细线或相对较小的微球。我们的起点是钝化的多晶Al线,阳极线上有一条狭缝和小孔。在讨论中,我们描述了金属丝部分从孔中完全排出时的温度T〜*如何影响由金属形成的微结构特征的形状。发现T *的高,中和低值分别对应于大微球,细线和小微球的形成。实验结果在讨论中进行了解释。

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