Novel technique for measuring the mechanical properties of porous materials by nanoindentation

Xi Chen; Yong Xiang; Joost J. Vlassak

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Novel technique for measuring the mechanical properties of porous materials by nanoindentation

机译：通过纳米压痕测量多孔材料力学性能的新技术

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A new technique for measuring the elastic-plastic properties of porous thin films by means of nanoindentation is proposed. The effects of porosity on indentation hardness and modulus are investigated through finite element analyses based on the Gurson model for plastic deformation of ductile porous materials. Intrinsic mechanical properties of the thin film are obtained by eliminating both substrate and densification effects. The technique is applied to the special case of a porous, low-permittivity dielectric thin film. The results are in good agreement with those obtained independently using the plane-strain bulge test.

机译：提出了一种利用纳米压痕法测量多孔薄膜弹塑性的新技术。通过基于Gurson模型的可塑性多孔材料塑性变形的有限元分析，研究了孔隙度对压痕硬度和模量的影响。薄膜的固有机械性能是通过消除基材和致密化作用而获得的。该技术适用于多孔，低介电常数电介质薄膜的特殊情况。结果与使用平面应变膨胀试验独立获得的结果非常一致。

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来源
《Journal of Materials Research》 |2006年第3期|p.715-724|共10页
作者
Xi Chen; Yong Xiang; Joost J. Vlassak;
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作者单位

Department of Civil Engineering and Engineering Mechanics, Columbia University, New York, New York 10027-6699;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类工程材料学;
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Novel technique for measuring the mechanical properties of porous materials by nanoindentation

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