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Solid-state growth of nickel silicide nanowire by the metal-induced growth method

机译:金属诱导生长法固态生长硅化镍纳米线

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摘要

Unique nanowire growth was accomplished at 575 deg C by the metal-induced growth (MIG) method. This involved a spontaneous reaction between metal and Si. The deposited metal worked as a catalyst layer to grow nanowires in the solid state. Various metals (Ni, Co, and Pd) were used in MIG nanowire fabrication, and the Ni-induced case was successful in demonstrating that metal species should be the dominant factor for growing nanowires. The Ni to Si composition was studied by energy dispersive spectroscopy showing the Ni diffusion inside the nanowire as well as the Ni silicide layer. The practical application of the MIG nanowire was proved by fabricating nanoscale contacts.
机译:通过金属诱导生长(MIG)方法在575摄氏度下完成了独特的纳米线生长。这涉及金属和Si之间的自发反应。沉积的金属用作催化剂层,以固态生长纳米线。在MIG纳米线的制造中使用了各种金属(Ni,Co和Pd),并且Ni诱导的情况成功证明了金属物种应该是生长纳米线的主导因素。通过能量色散光谱研究了镍到硅的成分,显示了纳米线内部以及硅化镍层中的镍扩散。通过制造纳米级触点,证明了MIG纳米线的实际应用。

著录项

  • 来源
    《Journal of Materials Research》 |2006年第11期|p.2936-2940|共5页
  • 作者单位

    Department of Electrical Engineering, University at Buffalo, State University of New York, Buffalo, New York 14260;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
  • 关键词

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