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首页> 外文期刊>Journal of Materials Research >Deposition and characterization of diamond-like carbon thin films by electro-deposition technique using organic liquid
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Deposition and characterization of diamond-like carbon thin films by electro-deposition technique using organic liquid

机译：使用有机液体的电沉积技术沉积和表征类金刚石碳薄膜

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摘要

Diamond-like carbon films were synthesized by electro-deposition technique from an organic liquid (a solution of alpha- and beta-pinenes in n-hexane) on silicon substrate at room temperature and at room pressure. The x-ray diffraction (XRD), Fourier-transform infrared (FTIR) spectra, Raman spectra, photoluminescence (PL), and x-ray absorption near edge structure (XANES) spectra analysis were used to study the properties of the diamond-like carbon (as-deposited and annealed) films. The XRD measurement indicated that the film contains some diamond-crystalline phases whereas Raman spectra did not show any prominent diamond-like peak. PL intensity as higher for the as-deposited film and decreased with high-temperature vacuum annealing. FTIR spectra showed the presence of sp~3 hybridization C-H bonds and their intensity decreases at higher annealing temperature. C and O K-edge XANES spectra showed that pi* (sp~2) intensity significantly decreases when the annealing temperature is 600 deg C.
机译：在室温和室温下，通过电沉积技术从硅基板上的有机液体（α-和β-pine烯在正己烷中的溶液）中合成出类金刚石碳膜。利用X射线衍射（XRD），傅立叶变换红外（FTIR）光谱，拉曼光谱，光致发光（PL）和X射线吸收近边缘结构（XANES）光谱分析来研究类金刚石的性质碳（沉积和退火）膜。 XRD测量表明该膜包含一些金刚石晶体相，而拉曼光谱未显示任何突出的类金刚石峰。对于沉积的膜，PL强度更高，而高温真空退火则降低。 FTIR光谱表明存在sp〜3杂化C-H键，且在较高的退火温度下强度降低。 C和O K边缘XANES光谱表明，当退火温度为600摄氏度时，pi *（sp〜2）强度显着降低。

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  • 来源
    《Journal of Materials Research》 |2004年第4期|p.1126-1132|共7页
  • 作者

    S. C. Ray; B. Bose; J. W. Chiou;

  • 作者单位

    Department of Physics, Tamkang University, Tamsui 251, Taiwan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
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