Contribution of substrate to converse piezoelectric response of constrained thin films

Chen L; Li JH; Slutsker J; Ouyang J; Roytburd AL

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Contribution of substrate to converse piezoelectric response of constrained thin films

机译：基板对约束薄膜的逆压电响应的贡献

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The converse piezoelectric response of a thin film constrained by a substrate is analyzed in different geometries under various boundary conditions. We consider the effects of elastic deformation of the substrate on the total displacement of the film surface induced by the electric field. The change of film thickness and the bending curvature of a film/substrate couple are calculated. For a thin film island clamped on a large thick substrate, the theoretical estimation of the piezoresponse, including a local bending in the vicinity of the island/substrate interface, is in agreement with the finite element calculation.

机译：在不同的边界条件下，以不同的几何形状分析了受衬底约束的薄膜的逆压电响应。我们考虑了基板的弹性变形对电场引起的薄膜表面总位移的影响。计算膜厚度的变化和膜/基板对的弯曲曲率。对于夹在大厚基板上的薄膜岛，压电响应的理论估计值包括有限元计算与在岛/基底界面附近的局部弯曲在内，在理论上是一致的。

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来源
《Journal of Materials Research》 |2004年第10期|p. 2853-2858|共6页
作者
Chen L; Li JH; Slutsker J; Ouyang J; Roytburd AL;
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作者单位

Univ Maryland, Dept Mat Sci & Engn, Mat Res Sci & Engn Ctr, College Pk, MD 20742 USA;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类工程材料学;
关键词
FERROELECTRIC-FILMS; DISPLACEMENTS; PIEZORESPONSE; STRESSES;

机译：铁膜;位移;压电响应;应力;

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Contribution of substrate to converse piezoelectric response of constrained thin films

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