Structural analysis of coexisting tetragonal and rhombohedral phases in polycrystalline Pb(Zr_(0.35)Ti_(0.65))O_3 thin films

Maxim B. Kelman; Paul C. McIntyre; Bryan C. Hendrix; Steven M. Bilodeau; Jeffrey F. Roeder; Sean Brennan

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Structural analysis of coexisting tetragonal and rhombohedral phases in polycrystalline Pb(Zr_(0.35)Ti_(0.65))O_3 thin films

机译：多晶Pb（Zr_（0.35）Ti_（0.65））O_3薄膜中共存的四面体和菱面体相的结构分析

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Structural properties of polycrystalline Pb(Zr_(0.35)Ti_(0.65))O_3 (PZT) thin films grown by metalorganic chemical vapor deposition on Ir bottom electrodes were investigated. Symmetric x-ray diffraction measurements showed that as-deposited 1500 A-thick PZT films are partially tetragonal and partially rhombohedral. Cross-section scanning electron microscopy showed that these films have a polycrystalline columnar microstructure with grains extending through the thickness of the film. X-ray depth profiling using the grazing-incidence asymmetric Bragg scattering geometry suggests that each grain has a bilayer structure consisting of a near-surface region in the tetragonal phase and the region at the bottom electrode interface in the rhombohedral phase. The required compatibility between the tetragonal and rhombohedral phases in the proposed layered structure of the 1500 A PZT can explain the peak shifts observed in the symmetric x-ray diffraction results of thicker PZT films.

机译：研究了通过金属有机化学气相沉积在Ir底部电极上生长的多晶Pb（Zr_（0.35）Ti_（0.65））O_3（PZT）薄膜的结构性能。对称的X射线衍射测量表明，沉积的1500 A厚的PZT薄膜部分为四方体，部分为菱面体。截面扫描电子显微镜显示，这些膜具有多晶柱状微观结构，其晶粒延伸穿过膜的厚度。使用掠入射非对称布拉格散射几何结构进行的X射线深度剖析表明，每个晶粒都具有双层结构，该双层结构由四方相中的近表面区域和菱面体相中的底部电极界面区域组成。拟议的1500 A PZT分层结构中四方相和菱面体相之间所需的相容性可以解释较厚PZT膜在对称X射线衍射结果中观察到的峰位移。

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《Journal of Materials Research》 |2003年第1期|p.173-179|共7页
作者
Maxim B. Kelman; Paul C. McIntyre; Bryan C. Hendrix; Steven M. Bilodeau; Jeffrey F. Roeder; Sean Brennan;
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Department of Materials Science and Engineering, Stanford University, Stanford, California 94305;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类工程材料学;
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1. Theoretical analysis of coexisting tetragonal and rhombohedral phase in PB(ZR_(0.35)TI_(0.65))O_3 films [J] . Chen Q., Li X., Li L., International Journal of Modern Physics, B. Condensed Matter Physics, Statistical Physics, Applied Physics . 2011,第11期

机译：PB（ZR_（0.35）TI_（0.65））O_3薄膜中四方相和菱面体相共存的理论分析
2. Theoretical analysis of coexisting tetragonal and rhombohedral phase in PB(ZR_(0.35)TI_(0.65))O_3 films [J] . Chen Q., Li X., Li L., International Journal of Modern Physics, B. Condensed Matter Physics, Statistical Physics, Applied Physics . 2011,第11期

机译：PB（ZR_（0.35）TI_（0.65））O_3薄膜中四方相和菱面体相共存的理论分析
3. Structural characterization and optical properties of Sol-gel-derived polycrystalline Pb(Zr_(0.35)Ti_(0.65))O_3 thin films [J] . Zhang F., Zhang R.J., Wang Z.Y., Journal of the Korean Physical Society . 2013,第1期

机译：溶胶凝胶衍生的多晶体Pb（Zr_（0.35）Ti_（0.65））O_3薄膜的结构表征和光学性质
4. Phase Transition and Dielectric Tunability of Chemical Solution Deposited (Pb_(0.35)Sr_(0.65))(Zr_(0.5)Ti_(0.5))O_3 Thin Films on Pt/ZrO_2/SiO_2/Si Substrates [C] . Naba K Karan, Marilin Perez, Jose Saavedra, MRS fall meeting . 2008

机译：在Pt / ZrO_2 / SiO_2 / Si衬底上沉积（Pb_（0.35）Sr_（0.65））（Zr_（0.5）Ti_（0.5））O_3薄膜的化学溶液的相变和介电可调谐性
5. Investigation of Melting and Solidification of Thin Polycrystalline Silicon Films via Mixed-Phase Solidification. [D] . Wang, Ying. 2016

机译：通过混合相凝固对多晶硅薄膜进行熔化和凝固的研究。
6. Ultra Uniform Pb0.865La0.09(Zr0.65Ti0.35)O3 Thin Films with Tunable Optical Properties Fabricated via Pulsed Laser Deposition [O] . Shenglin Jiang, Chi Huang, Honggang Gu, 2018

机译：通过脉冲激光沉积制备具有可调光学性能的超均匀Pb0.865La0.09（Zr0.65Ti0.35）O3薄膜
7. On ``Epitaxial Pb(Zr,Ti)O$_3$ thin films with coexisting tetragonal and rhombohedral phases'' [O] . Sergienko, I. A. 2001

机译：关于“外延pb（Zr，Ti）O $ _3 $薄膜共存四方晶系” 菱形阶段''
8. Epitaxial Pb(Zr(sub x)Ti(sub 1(minus)x))O(sub 3)/SrRuO(sub 3) (x = 0, 0.35, 0.65) multilayer thin films on SrTiO(sub 3)(100) and MgO(100) prepared by MOCVD and RF sputtering [R] . Foster, C. M., Csencsits, R., Baldo, P. M., 1995

机译：srTiO（sub 3）（100）上的外延pb（Zr（sub x）Ti（sub 1（minus）x））O（sub 3）/ srRuO（sub 3）（x = 0,0.35,0.65）多层薄膜通过mOCVD和RF溅射制备mgO（100）和mgO（100）

Structural analysis of coexisting tetragonal and rhombohedral phases in polycrystalline Pb(Zr_(0.35)Ti_(0.65))O_3 thin films

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