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首页> 外文期刊>Journal of Materials Research >Defect clustering in GaN irradiated with O+ ions
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Defect clustering in GaN irradiated with O+ ions

机译:O +离子辐照的GaN中的缺陷聚集

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摘要

Transmission electron microscopy (TEM) was used to study microstructures formed in GaN irradiated with 600-keV O+ ions at room temperature. Three types of defect Clusters were identified in the irradiated GaN: (I) basal-plane stacking faults with Dimensions ranging from 5 to 30 nm, (ii) pyramidal dislocation loops, and (iii) local Regions of highly disordered material. High-resolution TEM imaging clearly revealed That one type of the basal-plane stacking faults corresponded to insertion of one extra Ga-N basal plane in the otherwise perfect GaN lattice.
机译:透射电子显微镜(TEM)用于研究在室温下用600-keV O +离子辐照的GaN中形成的微观结构。在被辐照的GaN中发现了三种类型的缺陷簇:(I)尺寸在5到30 nm之间的基面堆叠断层,(ii)金字塔状位错环,以及(iii)高无序材料的局部区域。高分辨率TEM成像清楚地表明,一种类型的基面堆叠缺陷对应于在另外理想的GaN晶格中插入一个额外的Ga-N基面。

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