Novel photoluminescence from hydrogenated amorphous carbon films prepared by using xylene source

Jun Xu; Wei Li; Tianfu Ma

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Novel photoluminescence from hydrogenated amorphous carbon films prepared by using xylene source

机译：二甲苯源制备的氢化非晶碳薄膜的新型光致发光

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Hydrogenated amorphous carbon thin films were prepared by using organic hydrocarbon source, xylene (C_8H_10), in a plasma enhanced chemical vapor deposition (PECVD) system. In contrast to a single broad PL peak from methane (CH_4)-based hydrogenated amorphous carbon films, a new PL feature was observed from xylene-based a-C:H films in the blue-green light region. It was found that the aromatic structures were enhanced in xylene-based a-C:H films deposited at high radio frequency power, which may result in the existence of luminescence centers in the carbon films and induce the appearance of a new PL peak.

机译：通过在等离子增强化学气相沉积（PECVD）系统中使用有机烃源二甲苯（C_8H_10）制备氢化非晶碳薄膜。与基于甲烷（CH_4）的氢化非晶碳膜的单个宽PL峰形成鲜明对比的是，在蓝绿色光区域中，从基于二甲苯的a-C：H膜中观察到了新的PL特征。结果发现，在高射频功率下沉积的二甲苯基a-C：H薄膜中，芳香结构得到增强，这可能导致碳薄膜中存在发光中心，并导致出现新的PL峰。

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《Journal of Materials Research》 |2001年第2期|p.325-328|共4页
作者
Jun Xu; Wei Li; Tianfu Ma;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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正文语种 eng
中图分类工程材料学;
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Novel photoluminescence from hydrogenated amorphous carbon films prepared by using xylene source

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