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Surface textured zinc oxide films

机译:表面纹理氧化锌膜

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Both epitaxial and crystallographically fiber-textured ZnO films can exhibit a surface texturing ("cratered") morphology when grown by pulsed laser deposition at temperatures in the range of 350-750 deg. C in a background pressure of oxygen. The surface texturing is a consequence of the nucleation of oriented c axis grains that grow geometrically and impinge laterally. It is concluded that the surface texturing is due to nonequilibrium growth, being the result of a competition between the arriving flux, diffusive flux along the surface, and, possibly, concurrent ion etching from the laser-ablated plasma plume. At higher temperatures, no surface texturing occurs, presumably because of concurrent grain growth and more rapid surface smoothing by diffusion.
机译:当通过脉冲激光沉积在350-750度范围内的温度下生长时,外延的和晶体学上的纤维织构的ZnO膜都可以表现出表面织构(“凹陷”)形态。 C在氧气的背景压力下。表面纹理化是定向生长的c轴晶粒成核的结果,这些晶粒以几何方式生长并横向撞击。可以得出结论,表面纹理化是由于不平衡增长所致,这是到达的通量,沿表面的扩散通量以及可能同时从激光烧蚀的等离子体羽流进行离子刻蚀之间竞争的结果。在较高的温度下,不会发生表面纹理化,这可能是由于同时出现晶粒长大和扩散引起的更快的表面平滑。

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