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Synthesis of Sr_2KNb_5O_15 thin films by chemical solution deposition method

机译:化学溶液沉积法合成Sr_2KNb_5O_15薄膜

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摘要

Crack-free and transparent Sr_2KNb_5O_l5 (SKN) thin films have been synthesized by the chemical solution deposition method. A homogeneous and stable precursor solution was prepared via controlling the reaction of metal alkoxides. SKN precursor was found to be the complex alkoxide between Sr[Nb(OEt)_6]_2 and KNb(OEt)_6 with high structural symmetry. SKN powders and thin films on fused silica substrates directly crystallized to the polycrystalline tetragonal tungsten bronze phase at 600 deg. C. Highly oriented SKN thin films with the tetragonal tungsten bronze phase were fabricated on MgO(l00) and Pt(l00)/MgO(l00) substrates. TWo crystal lattice planes of SKN were intergrown at an orientation of l8.5 deg. on MgO(l00). The dielectric constant of SKN thin films on Pt(l00)/MgO(l00) was about 590 at 20 deg. C at l kHz.
机译:通过化学溶液沉积法合成了无裂纹且透明的Sr_2KNb_5O_l5(SKN)薄膜。通过控制金属醇盐的反应来制备均匀且稳定的前体溶液。发现SKN前体是Sr [Nb(OEt)_6] _2和KNb(OEt)_6之间具有高结构对称性的复杂醇盐。熔融石英基板上的SKN粉末和薄膜在600度下直接结晶为多晶四方钨青铜相。 C.在MgO(100)和Pt(100)/ MgO(100)衬底上制备具有四方钨青铜相的高取向SKN薄膜。 SKN的两个晶格面在18.5度的方向上相互生长。在MgO(100)上。在20度下,SKN薄膜在Pt(100)/ MgO(100)上的介电常数约为590。 C在1 kHz。

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