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首页> 外文期刊>Journal of Materials Research >MicrOanomechanical and tribological characterization of ultrathin amorphous carbon coatings
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MicrOanomechanical and tribological characterization of ultrathin amorphous carbon coatings

机译：超薄无定形碳涂层的MicrO /纳米力学和摩擦学表征

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摘要

Microanomechanical and tribological characterization of ultrathin amorphous carbon coatings, deposited by filtered cathodic arc (FCA), direct ion beam (IB), electron cyclotron resonance plasma chemical vapor deposition (ECR-CVD), and sputter (SP) deposition processes on Si substrate have been conducted using a nanoindenter with a nanoscratch attachment and an accelerated ball-on-flat tribometer. Coating thicknesses of 20, 10, 5 nm and, for the first time, 3.5 nm coatings have been investigated. It was found the FCA coating exhibits the highest hardness and elastic modulus, followed by the ECR-CVD, IB, and SP coatings. In general, the thicker coatings exhibited better scratchiwear performance than the thinner coatings due to their better load-carrying capacity as compared to the thinner coatings. At 20 nm, the FCA and ECR-CVD coatings show the best scratch and wear resistance, while the IB and ECR-CVD coatings show the best scratch and wear resistance at 10 nm. Five nanometer thick coatings show reasonable scratch and wear resistance, while 3.5 nm thick coatings show extremely low load-carrying capacity and poor scratch and wear resistance. It appears that the 3.5 nm coatings studied are unfeasible for scratch and wear resistance applications as of now.
机译：超薄无定形碳涂层的微/纳米力学和摩擦学表征，该涂层通过过滤的阴极电弧（FCA），直接离子束（IB），电子回旋共振等离子体化学气相沉积（ECR-CVD）和溅射（SP）在Si上沉积已经使用具有纳米划痕附着物和加速的平面球式摩擦计的纳米压头对基底进行了处理。已经研究了20、10、5 nm的涂层厚度，并且首次研究了3.5 nm的涂层。发现FCA涂层具有最高的硬度和弹性模量，其次是ECR-CVD，IB和SP涂层。通常，较厚的涂层比较薄的涂层表现出更好的刮擦性能，这是因为与较薄的涂层相比它们具有更好的承载能力。在20 nm时，FCA和ECR-CVD涂层显示出最佳的耐刮擦性和耐磨性，而IB和ECR-CVD涂层在10 nm处显示出最佳的耐刮擦性和耐磨性。五纳米厚的涂层显示出合理的耐刮擦性和耐磨性，而3.5纳米厚的涂层显示出极低的承载能力和差的耐刮擦性和耐磨性。到目前为止，似乎研究出的3.5 nm涂层对于防刮擦和耐磨性应用是不可行的。

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