Early stages of oxidation of aluminum nitride

Yongiun Geng; M. Grant Nortona

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Early stages of oxidation of aluminum nitride

机译：氮化铝氧化的早期阶段

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The early stages of oxidation of aluminum nitride have been studied by transmission electron microscopy and electron diffraction. It has been found that the oxide layer grows by the Stranki-Krastonow mechanism, where an initial uniform layer is followed by island formation. The onset of oxidation occurs at 800 deg. C and the initial oxide phase that fOrms is γ-Al_2O_3, one of the transition aluminas. The orien1ation relationship between the oxide layer and the underlying nitride is (440)_γ||(l l20)+ain and [ll2]_γ ||[01l0]_ain

机译：已经通过透射电子显微镜和电子衍射研究了氮化铝的氧化的早期阶段。已经发现，氧化物层通过Stranki-Krastonow机理生长，其中初始均匀层之后是岛形成。氧化的开始发生在800度。 C和fOrms的初始氧化物相为γ-Al_2O_3（过渡氧化铝之一）。氧化物层和下面的氮化物之间的取向关系为（440）_γ||（111）+ ain和[ll2]_γ|| [01l0] _ain

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《Journal of Materials Research》 |1999年第7期|2708-2711|共4页
作者
Yongiun Geng; M. Grant Nortona;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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正文语种 eng
中图分类工程材料学;
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Early stages of oxidation of aluminum nitride

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