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首页> 外文期刊>Journal of materials science >Influence of B_2O_3-SiO_2-ZnO-BaO glass ratio and sintering temperature on the microstructure and property of copper thick film for low temperature co-fired ceramic
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Influence of B_2O_3-SiO_2-ZnO-BaO glass ratio and sintering temperature on the microstructure and property of copper thick film for low temperature co-fired ceramic

机译:B_2O_3-SiO_2-ZnO-BaO的玻璃比和烧结温度对低温共烧陶瓷铜厚膜组织和性能的影响

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摘要

In this study, B_2O_3-SiO_2-ZnO-BaO (BSZB) glass-coated copper particles were prepared by sol-gel process for use in copper pastes. The pastes with different ratio of BSZB glass were sintered at temperatures ranging from 850 to 910 ℃ with low temperature co-fired ceramic (LTCC) substrate. When pastes prepared from 1 wt% glass-coated copper powder were sintered at 910 ℃, both a dense copper film and a dense LTCC structure were obtained. At this condition, the film had a thickness of approximately 15 μm and a sheet resistance of 1.9 mΩ/□, and a good bonding behavior between copper film and LTCC substrate was also observed.
机译:在这项研究中,B_2O_3-SiO_2-ZnO-BaO(BSZB)玻璃包覆的铜粒子是通过溶胶-凝胶法制备的,用于铜浆。在低温共烧陶瓷(LTCC)基板上,在850〜910℃的温度下烧结不同比例的BSZB玻璃浆料。当将由1 wt%的玻璃涂层铜粉制成的浆料在910℃下烧结时,既得到致密的铜膜又得到致密的LTCC结构。在此条件下,该膜具有约15μm的厚度和1.9mΩ/□的薄层电阻,并且还观察到铜膜与LTCC基板之间的良好结合行为。

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  • 来源
    《Journal of materials science》 |2016年第2期|1929-1937|共9页
  • 作者单位

    Key Laboratory of Advanced Ceramics and Machining Technology, Ministry of Education, School of Materials Science and Engineering of Tianjin University, Tianjin 300072, People's Republic of China;

    Key Laboratory of Advanced Ceramics and Machining Technology, Ministry of Education, School of Materials Science and Engineering of Tianjin University, Tianjin 300072, People's Republic of China;

    Key Laboratory of Advanced Ceramics and Machining Technology, Ministry of Education, School of Materials Science and Engineering of Tianjin University, Tianjin 300072, People's Republic of China;

    Key Laboratory of Advanced Ceramics and Machining Technology, Ministry of Education, School of Materials Science and Engineering of Tianjin University, Tianjin 300072, People's Republic of China;

    Key Laboratory of Advanced Ceramics and Machining Technology, Ministry of Education, School of Materials Science and Engineering of Tianjin University, Tianjin 300072, People's Republic of China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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