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首页> 外文期刊>Journal of Materials Science. Materials in Electronics >Investigation of polarization fatigue induced deep level transient spectroscopy in lead zirconate titanate thin film
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Investigation of polarization fatigue induced deep level transient spectroscopy in lead zirconate titanate thin film

机译:极化锆钛酸铅薄膜中的疲劳诱导深层瞬态光谱研究

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摘要

Deep level transient spectroscopy (DLTS) in pulsed laser deposited lead zirconate titanate (Pb(Zr_(0.52)Ti_(0.48))O_3 thin film grown on LSCO (La_(0.5)S-r_(0.5))O_3 bottom electrode and LaAlO_3 substrate has been investigated. The transient capacitance and the deep level energy inside the energy band gap are correlated with the number of bipolar switching cycles. It was found that both of them increase with the number of switching cycles.
机译:脉冲激光沉积锆酸钛酸铅(LS_(La_(0.5)S-r_(0.5))O_3底部电极和LaAlO_3衬底上生长的Pb(Zr_(0.52)Ti_(0.48))O_3薄膜上的深层瞬态光谱(DLTS)瞬态电容和能带隙内的深能级能量与双极开关周期数有关,发现它们都随着开关周期数的增加而增加。

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