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首页> 外文期刊>Journal of Materials Science. Materials in Electronics >Development of high sensitivity oxide based strain gauges and pressure sensors
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Development of high sensitivity oxide based strain gauges and pressure sensors

机译：基于高灵敏度氧化物的应变计和压力传感器的开发

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摘要

Strain gauges and pressure sensors are necessary tools for automotive, aerospace and biomedical monitoring applications. Of the various types of material, which can be used in their fabrication, oxides allow a degree of flexibility in their design. Furthermore, these devices are more rugged and cost effective than semiconductor sensors and have a higher sensitivity than metal-foil gauges. In this paper, the development of thin and thick film sensors based on oxides such as V_(2)O_(5), CeO_(2), Bi_(2)O_(3), In_(2)O_(3), RuO_(2), TiO_(2), MgO and Nb_(2)O_(5) is discussed. The devices are evaluated in terms of their sensitivity or gauge factor, linearity, hysteresis and long term stability. Furthermore, different device configurations, planar and sandwich are compared. It is found that the devices presented in this work have sensitivity comparable to that of semiconductor gauges, with good long-term stability. This is particularly true of the sandwich devices. It is observed that oxide based strain gauges may offer an alternative to existing commercial gauges, for example, in applications involving load cells, torque wrenches and limb implants.
机译：应变仪和压力传感器是汽车，航空航天和生物医学监测应用的必要工具。在可以用于其制造的各种类型的材料中，氧化物允许其设计具有一定程度的灵活性。此外，这些设备比半导体传感器更坚固耐用且更具成本效益，并且比金属箔规具有更高的灵敏度。本文基于诸如V_（2）O_（5），CeO_（2），Bi_（2）O_（3），In_（2）O_（3），RuO_等氧化物的薄膜传感器和厚膜传感器的开发讨论了（2），TiO_（2），MgO和Nb_（2）O_（5）。根据器件的灵敏度或规格系数，线性，磁滞和长期稳定性对其进行评估。此外，比较了不同的器件配置（平面和三明治）。发现在这项工作中提出的设备具有与半导体仪表相当的灵敏度，并具有良好的长期稳定性。对于夹心装置尤其如此。已经观察到，基于氧化物的应变仪可以提供对现有商用应变仪的替代，例如，在涉及称重传感器，扭矩扳手和肢体植入物的应用中。

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