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A finite element analysis of the motion and evolution of voids due to strain and electromigration induced surface diffusion

机译:应变和电迁移引起的表面扩散引起的空洞运动和演化的有限元分析

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摘要

Microelectronic circuits often fail because cracks and voids cause open circuits in their interconnects. Many of the mechanisms of failure are believed to be associated with diffusion of material along the surfaces, interfaces or grain boundaries in the line; material may also flow through the lattice of the crystal. The diffusion is driven by variations in elastic strain energy and stress in the solid, and by the flow of electric current.
机译:微电子电路通常会发生故障,因为裂缝和空隙会导致互连中的断路。据信许多破坏机理与材料沿生产线的表面,界面或晶界扩散有关。材料也可能流过晶体的晶格。扩散是由固体中的弹性应变能和应力的变化以及电流的流动驱动的。

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