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首页> 外文期刊>Journal of microanolithography, MEMS, and MOEMS >Microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy
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Microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy

机译：尺寸小巧的微型水浸式扫描镜，用于手持式超声和光声显微镜

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摘要

Microscanning mirrors that can operate reliably under water are useful in both ultrasound and photo-acoustic microscopic imaging, where fast scanning of focused high-frequency ultrasound beams is desired for pixel-by-pixel data acquisition. We report the development of a new microfabricated water-immersible scanning mirror with a small form factor. It consists of an optically and acoustically reflective mirror plate which is supported by two flexible polymer hinges and driven by an integrated electromagnetic microactuator. It can achieve 1 -axis scanning of ±12.1 deg at a resonant frequency of 250 Hz in air and 210 Hz in water, respectively. By optimizing the design and enhancing the fabrication with high-precision optical three-dimensional printing, the overall size of the scanning mirror module is less than 7 mm × 5 mm × 7 mm. The small form factor, large scanning angle, and high-resonant frequency of the new water-immersible scanning mirror make it suitable for building compact handheld imaging probes for in vivo high-speed and wide-field ultrasound and photoacoustic microscopy.
机译：可以在水下可靠运行的微扫描镜可用于超声和光声显微成像，其中需要快速扫描聚焦的高频超声束以逐像素采集数据。我们报告了一种新型的小型微型水浸式扫描镜的开发。它由光学和声学反射镜板组成，该镜板由两个柔性聚合物铰链支撑并由集成的电磁微致动器驱动。它可以在空气中250 Hz和水中210 Hz的共振频率下分别实现±12.1度的1轴扫描。通过优化设计并通过高精度光学三维打印增强制造，扫描镜模块的整体尺寸小于7 mm×5 mm×7 mm。新型水浸式扫描镜的外形小巧，扫描角度大，共振频率高，使其适用于构建紧凑的手持式成像探头，用于体内高速和宽视场超声及光声显微镜。

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  • 来源
    《Journal of microanolithography, MEMS, and MOEMS》 |2015年第3期|035004.1-035004.6|共6页
  • 作者

    Song Xu; Chih-Hsien Huang; Jun Zou;

  • 作者单位

    Texas A&M University, Institute for Solid State Electronics, Electrical Engineering Department, Room 220A, Wisenbaker Engineering Building, College Station, Texas 77843-3128, United States;

    Texas A&M University, Institute for Solid State Electronics, Electrical Engineering Department, Room 220A, Wisenbaker Engineering Building, College Station, Texas 77843-3128, United States;

    Texas A&M University, Institute for Solid State Electronics, Electrical Engineering Department, Room 220A, Wisenbaker Engineering Building, College Station, Texas 77843-3128, United States;

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  • 原文格式 PDF
  • 正文语种 eng
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  • 关键词

    water-immersible; scanning mirror; ultrasound; photoacoustic; microscopy;

    机译：水浸式扫描镜超声波光声显微镜检查;

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